A novel phase-shift-based amplitude detector for a high-speed atomic force microscope

AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.

Design and Fabrication of a High-Speed Atomic Force Microscope Scan-Head

Sensors ◽

10.3390/s21020362 ◽

2021 ◽

Vol 21 (2) ◽

pp. 362

Author(s):

Luke Oduor Otieno ◽

Bernard Ouma Alunda ◽

Jaehyun Kim ◽

Yong Joong Lee

Keyword(s):

Atomic Force Microscope ◽

Natural Frequency ◽

High Speed ◽

Contact Mode ◽

Ongoing Process ◽

Atomic Force ◽

Constant Height ◽

Mode Tracking

A high-speed atomic force microscope (HS-AFM) requires a specialized set of hardware and software and therefore improving video-rate HS-AFMs for general applications is an ongoing process. To improve the imaging rate of an AFM, all components have to be carefully redesigned since the slowest component determines the overall bandwidth of the instrument. In this work, we present a design of a compact HS-AFM scan-head featuring minimal loading on the Z-scanner. Using a custom-programmed controller and a high-speed lateral scanner, we demonstrate its working by obtaining topographic images of Blu-ray disk data tracks in contact- and tapping-modes. Images acquired using a contact-mode cantilever with a natural frequency of 60 kHz in constant deflection mode show good tracking of topography at 400 Hz. In constant height mode, tracking of topography is demonstrated at rates up to 1.9 kHz for the scan size of 1μm×1μm with 100×100 pixels.

Anin situatomic force microscope for normal-incidence nanofocus X-ray experiments

Journal of Synchrotron Radiation ◽

10.1107/s1600577516011437 ◽

2016 ◽

Vol 23 (5) ◽

pp. 1110-1117 ◽

Cited By ~ 3

Author(s):

M. V. Vitorino ◽

Y. Fuchs ◽

T. Dane ◽

M. S. Rodrigues ◽

M. Rosenthal ◽

...

Keyword(s):

Thin Film ◽

Atomic Force Microscope ◽

High Speed ◽

Normal Incidence ◽

Organic Thin Film ◽

X Ray ◽

Atomic Force ◽

Synchrotron Beamlines

A compact high-speed X-ray atomic force microscope has been developed forin situuse in normal-incidence X-ray experiments on synchrotron beamlines, allowing for simultaneous characterization of samples in direct space with nanometric lateral resolution while employing nanofocused X-ray beams. In the present work the instrument is used to observe radiation damage effects produced by an intense X-ray nanobeam on a semiconducting organic thin film. The formation of micrometric holes induced by the beam occurring on a timescale of seconds is characterized.

High-speed force mapping based on an astigmatic atomic force microscope

Measurement Science and Technology ◽

10.1088/1361-6501/aafa62 ◽

2019 ◽

Vol 30 (2) ◽

pp. 027002

Author(s):

Hsien-Shun Liao ◽

Ka Kit Lei ◽

Yu Fang Tseng

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Atomic Force ◽

Force Mapping

Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

Ultramicroscopy ◽

10.1016/j.ultramic.2015.10.016 ◽

2016 ◽

Vol 160 ◽

pp. 213-224 ◽

Cited By ~ 12

Author(s):

I. Soltani Bozchalooi ◽

A. Careaga Houck ◽

J.M. AlGhamdi ◽

K. Youcef-Toumi

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Large Range ◽

High Speed Imaging ◽

Atomic Force ◽

And Control

Design of high-speed atomic force microscope with a separated X-scanner

Optics and Precision Engineering ◽

10.3788/ope.20182603.0662 ◽

2018 ◽

Vol 26 (3) ◽

pp. 662-671 ◽

Cited By ~ 2

Author(s):

刘璐 LIU Lu ◽

吴森 WU Sen ◽

胡晓东 HU Xiao-dong ◽

庞海 PANG Hai ◽

胡小唐 HU Xiao-tang

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Atomic Force

High-speed imaging upgrade for a standard sample scanning atomic force microscope using small cantilevers

Review of Scientific Instruments ◽

10.1063/1.4895460 ◽

2014 ◽

Vol 85 (9) ◽

pp. 093702 ◽

Cited By ~ 28

Author(s):

Jonathan D. Adams ◽

Adrian Nievergelt ◽

Blake W. Erickson ◽

Chen Yang ◽

Maja Dukic ◽

...

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Standard Sample ◽

High Speed Imaging ◽

Atomic Force

Optimizing the driving scheme of a self-actuated atomic force microscope probe for high-speed applications

Ultramicroscopy ◽

10.1016/j.ultramic.2011.05.006 ◽

2011 ◽

Vol 111 (8) ◽

pp. 1388-1394 ◽

Cited By ~ 6

Author(s):

M. Balantekin ◽

F.L. Değertekin

Keyword(s):

Atomic Force Microscope ◽

High Speed ◽

Atomic Force Microscope Probe ◽

Atomic Force ◽

Microscope Probe