Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

2016 ◽  
Vol 160 ◽  
pp. 213-224 ◽  
Author(s):  
I. Soltani Bozchalooi ◽  
A. Careaga Houck ◽  
J.M. AlGhamdi ◽  
K. Youcef-Toumi
Keyword(s):  
Atomic Force Microscope ◽  
High Speed ◽  
Large Range ◽  
High Speed Imaging ◽  
Atomic Force ◽  
And Control

scholarly journals High-speed imaging upgrade for a standard sample scanning atomic force microscope using small cantilevers

2014 ◽  
Vol 85 (9) ◽  
pp. 093702 ◽  
Author(s):  
Jonathan D. Adams ◽  
Adrian Nievergelt ◽  
Blake W. Erickson ◽  
Chen Yang ◽  
Maja Dukic ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
High Speed ◽  
Standard Sample ◽  
High Speed Imaging ◽  
Atomic Force

High-Speed Atomic Force Microscope Technology：A Review

2021 ◽  
Vol 17 ◽  
Author(s):  
Ke Xu ◽  
Qiang An ◽  
Peng Li
Keyword(s):  
High Resolution ◽  
Atomic Force Microscope ◽  
High Speed ◽  
Control Method ◽  
Scanning Speed ◽  
Atomic Force ◽  
Wide Range ◽  
Working Principle ◽  
And Control ◽  
Dynamics Process

: The atomic force microscope (AFM) is widely used in many fields such as biology, materials, and physics due to its advantages of simple sample preparation, high-resolution topography measurement and wide range of applications. However, the low scanning speed of traditional AFM limits its dynamics process monitoring and other further application. Therefore, the improvement of AFM scanning speed has become more and more important. In this review, the working principle of AFM is first proposed. Then, we introduce the improvements of cantilever, drive mechanism, and control method of the high-speed atomic force microscope (HS-AFM). Finally, we provide the next developments of HS-AFM.

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation

2009 ◽  
Vol 131 (6) ◽  
Author(s):  
Georg E. Fantner ◽  
Daniel J. Burns ◽  
Angela M. Belcher ◽  
Ivo W. Rangelow ◽  
Kamal Youcef-Toumi
Keyword(s):  
Atomic Force Microscopy ◽  
High Speed ◽  
Microelectromechanical Systems ◽  
Industrial Process ◽  
Clinical Diagnostics ◽  
Mems Devices ◽  
High Speed Imaging ◽  
Force Microscopy ◽  
Atomic Force ◽  
And Control

New developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with integrated readout circuit and actuator built in on the cantilever. Such a fully instrumented cantilever allows a much more direct measurement and actuation of the cantilever motion and interaction with the sample. This technology is expected to not only allow for high speed imaging but also the miniaturization of AFMs. Based on the complexity of these integrated MEMS devices, a thorough understanding of their behavior and a specialized controls approach is needed to make the most use out of this new technology. In this paper we investigate the intrinsic properties of such MEMS cantilevers and develop a combined approach for sensing and control, optimized for high speed detection and actuation. Further developments based on the results presented in this paper will help to expand the use of atomic force microscopy to a broad range of everyday applications in industrial process control and clinical diagnostics.

Development, analysis and control of a high-speed laser-free atomic force microscope

2010 ◽  
Vol 81 (2) ◽  
pp. 023707 ◽  
Author(s):  
Saeid Bashash ◽  
Reza Saeidpourazar ◽  
Nader Jalili
Keyword(s):  
Atomic Force Microscope ◽  
High Speed ◽  
Atomic Force ◽  
Development Analysis ◽  
And Control

scholarly journals Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction

2021 ◽  
Author(s):  
Janik Schaude ◽  
Maxim Fimushkin ◽  
Tino Hausotte
Keyword(s):  
Atomic Force Microscope ◽  
Piezoelectric Actuator ◽  
High Speed ◽  
Closed Loop ◽  
Coefficient Of Thermal Expansion ◽  
Measuring System ◽  
Contact Mode ◽  
Loop Control ◽  
Atomic Force ◽  
Measuring Machine

AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.

scholarly journals Design and Fabrication of a High-Speed Atomic Force Microscope Scan-Head

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 362
Author(s):  
Luke Oduor Otieno ◽  
Bernard Ouma Alunda ◽  
Jaehyun Kim ◽  
Yong Joong Lee
Keyword(s):  
Atomic Force Microscope ◽  
Natural Frequency ◽  
High Speed ◽  
Contact Mode ◽  
Ongoing Process ◽  
Atomic Force ◽  
Constant Height ◽  
Mode Tracking

A high-speed atomic force microscope (HS-AFM) requires a specialized set of hardware and software and therefore improving video-rate HS-AFMs for general applications is an ongoing process. To improve the imaging rate of an AFM, all components have to be carefully redesigned since the slowest component determines the overall bandwidth of the instrument. In this work, we present a design of a compact HS-AFM scan-head featuring minimal loading on the Z-scanner. Using a custom-programmed controller and a high-speed lateral scanner, we demonstrate its working by obtaining topographic images of Blu-ray disk data tracks in contact- and tapping-modes. Images acquired using a contact-mode cantilever with a natural frequency of 60 kHz in constant deflection mode show good tracking of topography at 400 Hz. In constant height mode, tracking of topography is demonstrated at rates up to 1.9 kHz for the scan size of 1μm×1μm with 100×100 pixels.

Design and Control of a Dual-Probe Atomic Force Microscope

2018 ◽  
Vol 23 (1) ◽  
pp. 424-433 ◽  
Author(s):  
Muthukumaran Loganathan ◽  
Ayad Al-Ogaidi ◽  
Douglas A. Bristow
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
And Control ◽  
Dual Probe

Anin situatomic force microscope for normal-incidence nanofocus X-ray experiments

2016 ◽  
Vol 23 (5) ◽  
pp. 1110-1117 ◽  
Author(s):  
M. V. Vitorino ◽  
Y. Fuchs ◽  
T. Dane ◽  
M. S. Rodrigues ◽  
M. Rosenthal ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Force Microscope ◽  
High Speed ◽  
Normal Incidence ◽  
Organic Thin Film ◽  
X Ray ◽  
Atomic Force ◽  
Synchrotron Beamlines

A compact high-speed X-ray atomic force microscope has been developed forin situuse in normal-incidence X-ray experiments on synchrotron beamlines, allowing for simultaneous characterization of samples in direct space with nanometric lateral resolution while employing nanofocused X-ray beams. In the present work the instrument is used to observe radiation damage effects produced by an intense X-ray nanobeam on a semiconducting organic thin film. The formation of micrometric holes induced by the beam occurring on a timescale of seconds is characterized.

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