scholarly journals Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge

2018 ◽  
Vol 25 (8) ◽  
pp. 080705 ◽  
Author(s):  
Sarveshwar Sharma ◽  
Abhijit Sen ◽  
N. Sirse ◽  
M. M. Turner ◽  
A. R. Ellingboe
Keyword(s):  
Plasma Density ◽  
Applied Voltage ◽  
Plasma Discharge ◽  
Driving Frequency ◽  
Energy Control ◽  
Ion Energy ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

A Method for Interpreting V-I Probe in a Capacitively Coupled Plasma Discharge

2007 ◽  
pp. 327-330
Author(s):  
Su Jin Yoo ◽  
O Dae Kwon ◽  
Hee Hwan Choe ◽  
Jae Hong Jeon ◽  
Kang Woong Lee ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

2011 ◽  
Vol 39 (11) ◽  
pp. 2526-2527 ◽  
Author(s):  
Zhigang Chen ◽  
Jason Kenney ◽  
Shahid Rauf ◽  
Ken Collins ◽  
Tom Tanaka ◽  
...  
Keyword(s):  
Plasma Discharge ◽  
Large Area ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

2003 ◽  
Vol 94 (12) ◽  
pp. 7422 ◽  
Author(s):  
S. J. You ◽  
H. C. Kim ◽  
C. W. Chung ◽  
H. Y. Chang ◽  
J. K. Lee
Keyword(s):  
Power Dissipation ◽  
Driving Frequency ◽  
Mode Transition ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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