Optical emission spectroscopy for plasma diagnosis of 2.45 GHz ECR ion source at Peking University

Mapping Intimacies ◽

10.1063/1.5053246 ◽

2018 ◽

Author(s):

W. B. Wu ◽

S. X. Peng ◽

H. T. Ren ◽

Y. Xu ◽

J. M. Wen ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ecr Ion Source ◽

Plasma Diagnosis ◽

Peking University

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Hydrogen plasma diagnosis in penning ion source by optical emission spectroscopy

Vacuum ◽

10.1016/j.vacuum.2008.05.009 ◽

2008 ◽

Vol 83 (2) ◽

pp. 451-453 ◽

Author(s):

Da-Zhi Jin ◽

Zhong-Hai Yang ◽

Ping-Ying Tang ◽

Kun-xiang Xiao ◽

Jing-yi Dai

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Hydrogen Plasma ◽

Optical Emission ◽

Plasma Diagnosis

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Real-time monitoring of ion source plasma using optical emission spectroscopy

1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) ◽

10.1109/iit.1999.812113 ◽

2003 ◽

Author(s):

M.A. Graf ◽

V. Benveniste

Keyword(s):

Real Time ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Real Time Monitoring

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Optical emission spectroscopy of carbon laser plasma ion source

Optics Communications ◽

10.1016/j.optcom.2017.11.087 ◽

2018 ◽

Vol 412 ◽

pp. 134-140 ◽

Author(s):

Oguzhan Balki ◽

Md. Mahmudur Rahman ◽

Hani E. Elsayed-Ali

Keyword(s):

Laser Plasma ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Plasma Ion Source

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Studies on Hydrogen Plasma in a Penning Ion Source by Optical Emission Spectroscopy

IEEE Transactions on Plasma Science ◽

10.1109/tps.2013.2281055 ◽

2013 ◽

Vol 41 (10) ◽

pp. 2941-2945

Author(s):

Zhen Yang ◽

Pan Dong ◽

Tao Wang ◽

Jidong Long ◽

Chaohui Lan ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Hydrogen Plasma ◽

Optical Emission ◽

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Plasma diagnosis and end-point detection with an optical emission spectroscopy during high density inductively coupled BCl/sub 3/ plasma etching

The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2003.1229949 ◽

2003 ◽

Author(s):

G.S. Cho ◽

J.W. Lee ◽

W.T. Lim ◽

I.G. Baek ◽

K.S. Cho ◽

...

Keyword(s):

Plasma Etching ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

High Density ◽

Plasma Diagnosis ◽

Inductively Coupled ◽

End Point ◽

End Point Detection ◽

Point Detection

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Tomography feasibility study on the optical emission spectroscopy diagnostic for the negative ion source of the ELISE test facility

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/56/1/015006 ◽

2013 ◽

Vol 56 (1) ◽

pp. 015006 ◽

Author(s):

F Bonomo ◽

M Agostini ◽

M Brombin ◽

U Fantz ◽

P Franzen ◽

...

Keyword(s):

Feasibility Study ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Negative Ion ◽

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First measurements of optical emission spectroscopy on SPIDER negative ion source

Review of Scientific Instruments ◽

10.1063/1.5128900 ◽

2020 ◽

Vol 91 (1) ◽

pp. 013103 ◽

Author(s):

Barbara Zaniol ◽

Marco Barbisan ◽

Domenico Bruno ◽

Roberto Pasqualotto ◽

Cesare Taliercio ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

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Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP

Plasma Science and Technology ◽

10.1088/2058-6272/aaf592 ◽

2019 ◽

Vol 21 (4) ◽

pp. 045601

Author(s):

Yan WANG ◽

Zhimin LIU ◽

Lizhen LIANG ◽

Chundong HU

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Negative Ion ◽

Ratio Method ◽

Preliminary Results

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The plasma diagnosis by optical emission spectroscopy for the study of phosphorus doped nanocrystalline silicone film growth

2016 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2016.7463930 ◽

2016 ◽

Author(s):

Hsiang-Chih Yu ◽

Yu-Lin Hsieh ◽

Chia-Cheng Lu ◽

Chien-Chieh Lee ◽

Jenq-Yang Chang ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Film Growth ◽

Optical Emission ◽

Plasma Diagnosis ◽

Phosphorus Doped ◽

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Application of optical emission spectroscopy for the SNS H− ion source plasma studies

10.1063/1.4916430 ◽

2015 ◽

Author(s):

B. X. Han ◽

M. P. Stockli ◽

R. F. Welton ◽

S. N. Murray ◽

T. R. Pennisi ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

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