Low-energy mass-selected ion beam deposition of silicon carbide with Bernas-type ion source using methylsilane
Keyword(s):
Ion Beam
◽
1999 ◽
Vol 198-199
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pp. 731-733
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Development of a high energy large sheet ion beam system and a low energy ion beam deposition system
1994 ◽
pp. 63-68
Keyword(s):
Ion Beam
◽