Stability of the surface passivation properties of atomic layer deposited aluminum oxide in damp heat conditions
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Keyword(s):
2017 ◽
Vol 56
(8S2)
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pp. 08MB14
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Keyword(s):
2011 ◽
Vol 158
(12)
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pp. H1279
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2013 ◽
Vol 46
(38)
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pp. 385102
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2008 ◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 334
(1)
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pp. 113-117
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