The formation of a multilayer structure with integrated membranes based on channel silicon
Keyword(s):
2015 ◽
Vol 60
(6)
◽
pp. 511-520
◽
Keyword(s):
Keyword(s):
2019 ◽
Vol 45
(6)
◽
pp. 7407-7412
◽
2012 ◽
Vol 4
(4)
◽
pp. 1115-1123
◽
Keyword(s):
2003 ◽
Vol 336
(3-4)
◽
pp. 344-348
◽