High‐Sensitivity Profilometry for Measurement of Multilayer Structure with Low‐Coherence Composite Interferometer

2021 ◽  
pp. 2000823
Author(s):  
Yu‐Kai Lin ◽  
Chi‐Chu Cheng ◽  
I‐Jen Hsu
2012 ◽  
Vol 51 (19) ◽  
pp. 4333 ◽  
Author(s):  
Lazo M. Manojlović ◽  
Miloš B. Živanov ◽  
Miloš P. Slankamenac ◽  
Jovan S. Bajić ◽  
Dragan Z. Stupar

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 629 ◽  
Author(s):  
Erwin Maciak

The main aim of this work was the design and development simple fiber optic Fabry-Perot interferometer (FPI) sensor devices for relative humidity (RH) sensing with emphasis on high sensitivity and good stability. The RH fiber FPI sensor is fabricated by coating the end of a cleaved standard multi-mode (MM) fiber with hydrophilic Nafion® sensing film. The Nafion® thin film acts as an active resonance cavity of the low-coherence interferometric sensing structure. The fringe pattern, which is caused by interfering light beam in the Nafion® thin film will shift as the RH changes because the water molecules will swell the Nafion® film and thus change optical pathlength of the sensing structure. The operating principle of a FPI sensor based on the adsorption and desorption of water vapour in the Nafion® and the limitations of this sensor type are discussed in this work. The fiber optic hygrometer was tested in the visible (400–900 nm) region of spectra for measurement of relative humidity (RH) in the range of 5.5–80% at room temperature (RT) in air. The fiber optic humidity sensor has a very short response time (t90 = 5–80 s) and a fast regeneration time (t10 = 5–12 s) as good as commercial sensors.


1994 ◽  
Vol 144 ◽  
pp. 21-28 ◽  
Author(s):  
G. B. Gelfreikh

AbstractA review of methods of measuring magnetic fields in the solar corona using spectral-polarization observations at microwaves with high spatial resolution is presented. The methods are based on the theory of thermal bremsstrahlung, thermal cyclotron emission, propagation of radio waves in quasi-transverse magnetic field and Faraday rotation of the plane of polarization. The most explicit program of measurements of magnetic fields in the atmosphere of solar active regions has been carried out using radio observations performed on the large reflector radio telescope of the Russian Academy of Sciences — RATAN-600. This proved possible due to good wavelength coverage, multichannel spectrographs observations and high sensitivity to polarization of the instrument. Besides direct measurements of the strength of the magnetic fields in some cases the peculiar parameters of radio sources, such as very steep spectra and high brightness temperatures provide some information on a very complicated local structure of the coronal magnetic field. Of special interest are the results found from combined RATAN-600 and large antennas of aperture synthesis (VLA and WSRT), the latter giving more detailed information on twodimensional structure of radio sources. The bulk of the data obtained allows us to investigate themagnetospheresof the solar active regions as the space in the solar corona where the structures and physical processes are controlled both by the photospheric/underphotospheric currents and surrounding “quiet” corona.


Author(s):  
Kazumichi Ogura ◽  
Michael M. Kersker

Backscattered electron (BE) images of GaAs/AlGaAs super lattice structures were observed with an ultra high resolution (UHR) SEM JSM-890 with an ultra high sensitivity BE detector. Three different types of super lattice structures of GaAs/AlGaAs were examined. Each GaAs/AlGaAs wafer was cleaved by a razor after it was heated for approximately 1 minute and its crosssectional plane was observed.First, a multi-layer structure of GaAs (100nm)/AlGaAs (lOOnm) where A1 content was successively changed from 0.4 to 0.03 was observed. Figures 1 (a) and (b) are BE images taken at an accelerating voltage of 15kV with an electron beam current of 20pA. Figure 1 (c) is a sketch of this multi-layer structure corresponding to the BE images. The various layers are clearly observed. The differences in A1 content between A1 0.35 Ga 0.65 As, A1 0.4 Ga 0.6 As, and A1 0.31 Ga 0.69 As were clearly observed in the contrast of the BE image.


Author(s):  
D. A. Carpenter ◽  
M. A. Taylor

The development of intense sources of x rays has led to renewed interest in the use of microbeams of x rays in x-ray fluorescence analysis. Sparks pointed out that the use of x rays as a probe offered the advantages of high sensitivity, low detection limits, low beam damage, and large penetration depths with minimal specimen preparation or perturbation. In addition, the option of air operation provided special advantages for examination of hydrated systems or for nondestructive microanalysis of large specimens.The disadvantages of synchrotron sources prompted the development of laboratory-based instrumentation with various schemes to maximize the beam flux while maintaining small point-to-point resolution. Nichols and Ryon developed a microprobe using a rotating anode source and a modified microdiffractometer. Cross and Wherry showed that by close-coupling the x-ray source, specimen, and detector, good intensities could be obtained for beam sizes between 30 and 100μm. More importantly, both groups combined specimen scanning with modern imaging techniques for rapid element mapping.


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