Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges

2021 ◽  
Vol 92 (9) ◽  
pp. 093504
Author(s):  
T. J. A. Staps ◽  
B. Platier ◽  
D. Mihailova ◽  
P. Meijaard ◽  
J. Beckers
Author(s):  
Jinming Li ◽  
Aleksandr M. Astafiev ◽  
Anatoly A. Kudryavtsev ◽  
Chengxun Yuan ◽  
Zhongxiang Zhou ◽  
...  

2020 ◽  
Vol 10 (12) ◽  
pp. 4331
Author(s):  
Bart Platier ◽  
Tim Staps ◽  
Peter Koelman ◽  
Marc van der Schans ◽  
Job Beckers ◽  
...  

Since the 1940s, Microwave Cavity Resonance Spectroscopy (MCRS) has been used to investigate a variety of solids, gases, and low-pressure plasmas. Recently, the working terrain of the diagnostic method has been expanded with atmospheric-pressure plasmas. This review discusses the advancements that were required for this transition and implications of studying highly collisional, with respect to the probing frequencies, plasmas. These developments and implications call for a redefinition of the limitations of MCRS, which also impact studies of low-pressure plasmas using the diagnostic method. Moreover, a large collection of recommendations concerning the approach and its potential for future studies is presented.


Author(s):  
Tim Jacobus Adrianus Staps ◽  
Tim Jacobus Maria Donders ◽  
Bart Platier ◽  
J Beckers

Abstract A dust grain immersed in a low-pressure gas discharge obtains a permanent negative surface charge due to the high mobility of electrons compared to that of ions. This charge essentially governs all fundamental processes in dusty and complex plasmas involving dust grains, neutrals, (an)ions and electrons and—consequently—virtually all industrial applications of these types of plasmas are affected and steered by it. In this work, we have measured the surface charge by application of laser-induced electron detachment from nanosized dust grains in concert with microwave cavity resonance spectroscopy and laser light extinction. The main result is that the electron release is governed by photodetachment rather than by thermionic emission, and that recharging of the dust grains occurs on timescales that are well in agreement with the orbital-motion-limited (OML) theory. The total surface charge density residing on the dust grains inside the laser volume follows from the saturation of the photodetachment signal, which was used in combination with dust density values derived from extinction measurements to estimate the mean dust charge. The negative dust charge on the 140 nm (average) diameter dust grains in this work is obtained to be in the range of 273 − 2519 elementary charges, of which the lower bound matches well with analytical predictions using the orbital-motion-limited (OML) theory.


2019 ◽  
Vol 100 (6) ◽  
Author(s):  
M. A. W. van Ninhuijs ◽  
K. A. Daamen ◽  
J. G. H. Franssen ◽  
J. Conway ◽  
B. Platier ◽  
...  

1986 ◽  
Vol 59 (7) ◽  
pp. 2324-2331 ◽  
Author(s):  
H. J. Cornelissen ◽  
H. J. H. Merks‐Eppingbroek

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.


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