Multiscale modeling of plasma–surface interaction—General picture and a case study of Si and SiO2 etching by fluorocarbon-based plasmas

2021 ◽  
Vol 8 (4) ◽  
pp. 041305
Author(s):  
Patrick Vanraes ◽  
Syam Parayil Venugopalan ◽  
Annemie Bogaerts
Keyword(s):  
Multiscale Modeling ◽  
Surface Interaction ◽  
General Picture ◽  
Plasma Surface ◽  
Sio2 Etching

Systems of In Situ Diagnostics of Plasma-Surface Interaction in a Mephist-1 Tokamak

2021 ◽  
Author(s):  
V. A. Kurnaev ◽  
V. E. Nikolaeva ◽  
S. A. Krat ◽  
E. D. Vovchenko ◽  
A. V. Kaziev ◽  
...  
Keyword(s):  
Surface Interaction ◽  
Plasma Surface ◽  
In Situ Diagnostics

scholarly journals The upgraded TOMAS device: A toroidal plasma facility for wall conditioning, plasma production, and plasma–surface interaction studies

2021 ◽  
Vol 92 (2) ◽  
pp. 023506
Author(s):  
A. Goriaev ◽  
T. Wauters ◽  
S. Möller ◽  
R. Brakel ◽  
S. Brezinsek ◽  
...  
Keyword(s):  
Surface Interaction ◽  
Plasma Production ◽  
Plasma Surface ◽  
Toroidal Plasma ◽  
Interaction Studies
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