Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas

Stefan Ries; Manuel Schroeder; Marc Woestefeld; Carles Corbella; Ihor Korolov; Peter Awakowicz; Julian Schulze

doi:10.1063/5.0059658

Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas

Review of Scientific Instruments ◽

10.1063/5.0059658 ◽

2021 ◽

Vol 92 (10) ◽

pp. 103503

Author(s):

Stefan Ries ◽

Manuel Schroeder ◽

Marc Woestefeld ◽

Carles Corbella ◽

Ihor Korolov ◽

...

Keyword(s):

Low Temperature ◽

Sensor Array ◽

Ion Flux ◽

Field Energy ◽

Energy Analyzer ◽

Ion Energy ◽

Spatially Resolved ◽

Low Temperature Plasmas

Download Full-text

A novel method of using the OES line ratio to determine the spatially resolved atomic density in low-temperature plasmas and its application in carbon and aluminium atoms in capacitively coupled plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/44/45/455203 ◽

2011 ◽

Vol 44 (45) ◽

pp. 455203 ◽

Cited By ~ 2

Author(s):

Jiang Li ◽

Xi-Ming Zhu ◽

Yi-Kang Pu

Keyword(s):

Low Temperature ◽

Line Ratio ◽

Atomic Density ◽

Capacitively Coupled ◽

Spatially Resolved ◽

Novel Method ◽

Low Temperature Plasmas ◽

Coupled Plasmas

Download Full-text

A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

Review of Scientific Instruments ◽

10.1063/1.4870900 ◽

2014 ◽

Vol 85 (4) ◽

pp. 043509 ◽

Cited By ~ 4

Author(s):

S. Sharma ◽

D. Gahan ◽

S. Kechkar ◽

S. Daniels ◽

M. B. Hopkins

Keyword(s):

Field Energy ◽

Energy Analyzer ◽

Semiconductor Wafer ◽

Spatially Resolved

Download Full-text

Application of Image Reconstruction Technique for the Measurement of Two-Dimensional Ion Energy Distributions Using a Retarding-Field Energy Analyzer

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.l1219 ◽

1996 ◽

Vol 35 (Part 2, No. 9B) ◽

pp. L1219-L1221

Author(s):

Fumiyoshi Tochikubo ◽

Kenkoh Suemasa ◽

Tsuneo Watanabe

Keyword(s):

Image Reconstruction ◽

Field Energy ◽

Reconstruction Technique ◽

Two Dimensional ◽

Energy Analyzer ◽

Energy Distributions ◽

Ion Energy ◽

Image Reconstruction Technique ◽

Ion Energy Distributions

Download Full-text

Ion energy, ion flux, and ion mass effects on low‐temperature silicon epitaxy using low‐energy ion bombardment process

Journal of Applied Physics ◽

10.1063/1.361161 ◽

1996 ◽

Vol 79 (5) ◽

pp. 2347-2351 ◽

Cited By ~ 51

Author(s):

Wataru Shindo ◽

Tadahiro Ohmi

Keyword(s):

Low Temperature ◽

Ion Bombardment ◽

Ion Flux ◽

Low Energy ◽

Ion Energy ◽

Mass Effects ◽

Silicon Epitaxy

Download Full-text

Magnetized retarding field energy analyzer measuring the particle flux and ion energy distribution of both positive and negative ions

Review of Scientific Instruments ◽

10.1063/1.4919730 ◽

2015 ◽

Vol 86 (5) ◽

pp. 053302 ◽

Cited By ~ 4

Author(s):

Dmytro Rafalskyi ◽

Stanislav Dudin ◽

Ane Aanesland

Keyword(s):

Energy Distribution ◽

Particle Flux ◽

Negative Ions ◽

Field Energy ◽

Energy Analyzer ◽

Ion Energy ◽

Ion Energy Distribution

Download Full-text

High-resolution submicron retarding field energy analyzer for low-temperature plasma analysis

Applied Physics Letters ◽

10.1063/1.125495 ◽

1999 ◽

Vol 75 (25) ◽

pp. 3923-3925 ◽

Cited By ~ 10

Author(s):

M. G. Blain ◽

J. E. Stevens ◽

J. R. Woodworth

Keyword(s):

High Resolution ◽

Low Temperature ◽

Field Energy ◽

Low Temperature Plasma ◽

Energy Analyzer ◽

Temperature Plasma ◽

Plasma Analysis

Download Full-text

Measurements of plasma ion energy distributions with a submicron retarding field energy analyzer

10.2514/6.1998-2986 ◽

1998 ◽

Author(s):

M. Blain ◽

J. Stevens ◽

J. Woodworth ◽

C. Nichols

Keyword(s):

Field Energy ◽

Energy Analyzer ◽

Energy Distributions ◽

Ion Energy ◽

Ion Energy Distributions

Download Full-text

Analysis of ion energy distribution at the substrate during a HPPMS (Cr,Al)N process using retarding field energy analyzer and energy resolved mass spectrometer

Thin Solid Films ◽

10.1016/j.tsf.2015.08.059 ◽

2015 ◽

Vol 596 ◽

pp. 140-146 ◽

Cited By ~ 6

Author(s):

K. Bobzin ◽

T. Brögelmann ◽

R.H. Brugnara ◽

S. Chromy

Keyword(s):

Energy Distribution ◽

Mass Spectrometer ◽

Field Energy ◽

Energy Analyzer ◽

Ion Energy ◽

Ion Energy Distribution

Download Full-text

Mass-resolved retarding field energy analyzer and its measurement of ion energy distribution in helicon plasma

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2004.12.121 ◽

2005 ◽

Vol 229 (3-4) ◽

pp. 508-518 ◽

Cited By ~ 2

Author(s):

Nan Jiang ◽

Ning Zhao ◽

Hongfei Liu ◽

Tongzhen Fang

Keyword(s):

Energy Distribution ◽

Field Energy ◽

Energy Analyzer ◽

Helicon Plasma ◽

Ion Energy ◽

Ion Energy Distribution

Download Full-text

Low-temperature plasmas with nonequilibrium ionization

Uspekhi Fizicheskih Nauk ◽

10.3367/ufnr.0128.197906b.0233 ◽

1979 ◽

Vol 128 (6) ◽

pp. 233 ◽

Cited By ~ 20

Author(s):

L.M. Biberman ◽

V.S. Vorob'ev ◽

I.T. Yakubov

Keyword(s):

Low Temperature ◽

Nonequilibrium Ionization ◽

Low Temperature Plasmas

Download Full-text