Preparation of YBa2Cu3Oy, superconducting thin films by radio-frequency plasma flash evaporation apparatus

1993 ◽  
Vol 42 (1-2) ◽  
pp. 117-122 ◽  
Author(s):  
K. Komori ◽  
W. Fukagawa ◽  
M. Fukutomi ◽  
Y. Tanaka ◽  
T. Asano ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Superconducting Thin Films ◽  
Flash Evaporation ◽  
Frequency Plasma ◽  
Evaporation Apparatus

Preparation of YBa2Cu3OySuperconducting Thin Films by Radio-Frequency Plasma Flash Evaporation

1991 ◽  
Vol 30 (Part 1, No. 6) ◽  
pp. 1216-1217 ◽  
Author(s):  
Wataru Fukagawa ◽  
Kazunori Komori ◽  
Masao Fukutomi ◽  
Yoshiaki Tanaka ◽  
Toshihisa Asano ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Flash Evaporation ◽  
Frequency Plasma

Application of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films

2000 ◽  
Vol 71 (12) ◽  
pp. 4483 ◽  
Author(s):  
Kanetoshi Shibata ◽  
Hiroaki Ito ◽  
Noboru Yugami ◽  
Yasushi Nishida ◽  
Tadaomi Miyazaki
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Electrochromic characteristics of radio frequency plasma sputtered WO 3 thin films onto flexible polyethylene terephthalate substrates

2017 ◽  
Vol 634 ◽  
pp. 40-50 ◽  
Author(s):  
Esin Eren ◽  
Gozde Yurdabak Karaca ◽  
Umran Koc ◽  
Lutfi Oksuz ◽  
Aysegul Uygun Oksuz
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Polyethylene Terephthalate ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals Atomic Layer Deposition Al2O3 Thin Films in Magnetized Radio Frequency Plasma Source

2011 ◽  
Vol 18 ◽  
pp. 100-106 ◽  
Author(s):  
Xingcun Li ◽  
Qiang Chen ◽  
Lijun Sang ◽  
Lizhen Yang ◽  
Zhongwei Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Radio Frequency ◽  
Atomic Layer ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Layer Deposition ◽  
Frequency Plasma
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