An alN-based piezoelectric micromachined ultrasonic transducer with a double-beam suspended structure
Keyword(s):
1967 ◽
Vol 28
(C2)
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pp. C2-156-C2-164
Keyword(s):
2020 ◽
Vol 140
(2)
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pp. 37-42
Keyword(s):
2019 ◽
Vol 34
(4)
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pp. 416-424
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