CHF
3
Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy
2008 ◽
Vol 25
(8)
◽
pp. 2942-2945
◽
2011 ◽
Vol 13
(1)
◽
pp. 61-67
◽
2013 ◽
Vol 15
(9)
◽
pp. 885-890
◽
2009 ◽
Vol 27
(5)
◽
pp. 1159-1165
◽
2009 ◽
Vol 23
(28)
◽
pp. 3409-3417
◽
Keyword(s):
2017 ◽
Vol 20
(2)
◽
pp. 024005
◽