scholarly journals Phase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma

2013 ◽  
Vol 62 (20) ◽  
pp. 205208
Author(s):  
Du Yong-Quan ◽  
Liu Wen-Yao ◽  
Zhu Ai-Min ◽  
Li Xiao-Song ◽  
Zhao Tian-Liang ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

CHF 3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy

2008 ◽  
Vol 25 (8) ◽  
pp. 2942-2945 ◽  
Author(s):  
Xu Yi-Jun ◽  
Ye Chao ◽  
Huang Xiao-Jiang ◽  
Yuan Jing ◽  
Xing Zhen-Yu ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF3 plasma

2009 ◽  
Vol 16 (4) ◽  
pp. 043509 ◽  
Author(s):  
Xiao-Jiang Huang ◽  
Yu Xin ◽  
Lei Yang ◽  
Chao Ye ◽  
Qiang-Hua Yuan ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled

EXPERIMENTAL STUDY OF SPATIAL NON-UNIFORMITIES IN A DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA

2009 ◽  
Vol 23 (28) ◽  
pp. 3409-3417 ◽  
Author(s):  
GUOLI ZHAO ◽  
YONG XU ◽  
JIANPING SHANG ◽  
AIMIN ZHU ◽  
WENQI LU ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Low Frequency ◽  
Argon Plasma ◽  
Optical Emission ◽  
Plasma Emission ◽  
Dual Frequency ◽  
Double Peak ◽  
Capacitively Coupled ◽  
Frequency Source

Radial non-uniformities of dual frequency capacitively coupled argon plasma were experimentally studied, using an optical emission spectroscopy probe, for different discharge pressures, discharge gaps, and frequencies and powers of the low frequency source. It was shown that the plasma emission profiles strongly depend on the working gas pressure and the lower frequency (LF) power. With the increasing LF power the emission profiles changed from a bell-shaped distribution at low LF power to a double-peak distribution at high LF power.

The optical emission spectroscopy of nitrogen plasma driven by the 94.92 MHz/13.56 MHz dual-frequency

2020 ◽  
Vol 384 (12) ◽  
pp. 126367
Author(s):  
Qianghua Yuan ◽  
Pei Ren ◽  
Shanshan Liu ◽  
Jingjing Wang ◽  
Guiqin Yin
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Plasma ◽  
Dual Frequency
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