Effects of Substrate Temperature on Properties of Transparent Conductive Ta-Doped TiO
                    2
                    Films Deposited by Radio-Frequency Magnetron Sputtering

Radio Frequency Magnetron Sputtering

Relation between surface and bulk electronic properties of Al doped ZnO films deposited at varying substrate temperature by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4923224 ◽

2015 ◽

Vol 117 (24) ◽

pp. 245312 ◽

Cited By ~ 16

Author(s):

C. C. Singh ◽

T. A. Patel ◽

E. Panda

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Electronic Properties ◽

Zno Films ◽

Doped Zno

Effect of Substrate Temperature on (Micro/Nano)Structure of a-SiC:H Thin Films Deposited by Radio-Frequency Magnetron Sputtering.

The Journal of Physical Chemistry C ◽

10.1021/jp3079937 ◽

2012 ◽

Vol 116 (39) ◽

pp. 21018-21026 ◽

Cited By ~ 14

Author(s):

Mohsen Daouahi ◽

Najeh Rekik

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Nano Structure

Effect of substrate temperature on the crystallization of Pb(Zr,Ti)O3 films on Pt/Ti/Si substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target

Materials Science and Engineering B ◽

10.1016/s0921-5107(02)00161-7 ◽

2002 ◽

Vol 95 (1) ◽

pp. 36-42 ◽

Cited By ~ 26

Author(s):

Reji Thomas ◽

Shoichi Mochizuki ◽

Toshiyuki Mihara ◽

Tadashi Ishida

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Si Substrates

Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Solar Energy ◽

10.1016/j.solener.2019.09.095 ◽

2019 ◽

Vol 194 ◽

pp. 471-477 ◽

Cited By ~ 3

Author(s):

Yanfeng Wang ◽

Jianmin Song ◽

Jie Zhang ◽

Guoxi Zheng ◽

Xiaochen Duan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Zno Films ◽

Doped Zno ◽

Co Doped

Effect of substrate temperature on structural and optical properties of radio‐frequency magnetron sputtering Ce 0.97 Co 0.03 O 2 thin films

physica status solidi (a) ◽

10.1002/pssa.202100630 ◽

2022 ◽

Author(s):

Shenghong Yang ◽

Yueli Zhang

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Structural And Optical Properties

Substrate Temperature Dependent Surface Morphology and Photoluminescence of Germanium Quantum Dots Grown by Radio Frequency Magnetron Sputtering

International Journal of Molecular Sciences ◽

10.3390/ijms131012880 ◽

2012 ◽

Vol 13 (12) ◽

pp. 12880-12889 ◽

Cited By ~ 7

Author(s):

Alireza Samavati ◽

Zulkafli Othaman ◽

Sib Krishna Ghoshal ◽

Mohammad Reza Dousti ◽

Mohammed Rafiq Abdul Kadir

Keyword(s):

Quantum Dots ◽

Surface Morphology ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Temperature Dependent ◽

Germanium Quantum Dots

Influence of substrate temperature on the structural and optoelectronic properties of ZnMgO:Al coatings deposited by radio frequency magnetron sputtering

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj2.21062 ◽

2021 ◽

Vol 129 (12) ◽

pp. 714-719

Author(s):

Du-Cheng TSAI ◽

Feng-Kuan CHEN ◽

Zue-Chin CHANG ◽

Bing-Hau KUO ◽

Erh-Chiang CHEN ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Structural And Optoelectronic Properties

Influence Of Substrate ◽

607 Influence of O_2 Gas Partial Pressure and Substrate Temperature on Wear Resistance of Al_2O_3 films deposited by Radio-Frequency Magnetron Sputtering

The Proceedings of the JSME Materials and Processing Conference (M&P) ◽

10.1299/jsmeintmp.10.2.464 ◽

2002 ◽

Vol 10.2 (0) ◽

pp. 464-467

Author(s):

Hirokazu Fujiyama ◽

Tsunetaka Sumomogi ◽

Kenji Uchijo

Keyword(s):

Wear Resistance ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Partial Pressure ◽

Radio Frequency Magnetron Sputtering

Effect of substrate temperature on the structural, electrical, and optical properties of GZO/ZnO films deposited by radio frequency magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2013.11.127 ◽

2014 ◽

Vol 40 (5) ◽

pp. 6673-6676 ◽

Cited By ~ 14

Author(s):

Sun-Kyung Kim ◽

Seung-Hong Kim ◽

So-Young Kim ◽

Jae-Hyun Jeon ◽

Tae-Kyung Gong ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Zno Films ◽

Electrical And Optical Properties

Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2009.00602 ◽

2009 ◽

Vol 24 (3) ◽

pp. 602-606 ◽

Cited By ~ 1

Author(s):

Wei-Jia FU ◽

Zhi-Wen LIU ◽

Jian-Feng GU ◽

Ming LIU ◽

Qing-Yu ZHANG

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Morphological Evolution ◽

Radio Frequency Magnetron Sputtering

Zno Films ◽

Negative Bias ◽