Atomic force microscopy investigation of polysilicon films before and after SIMS analysis: the effects of sample rotation

1998 ◽  
Vol 10 (8) ◽  
pp. 1699-1706 ◽  
Author(s):  
S J Guilfoyle ◽  
A Chew ◽  
N E Moiseiwitsch ◽  
D E Sykes ◽  
M Petty
2019 ◽  
Vol 28 (27) ◽  
pp. 79-84 ◽  
Author(s):  
Renate Hiesgen ◽  
Ines Wehl ◽  
K. Andreas Friedrich ◽  
Mathias Schulze ◽  
Andrea Haug ◽  
...  

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