Characterization of cathodic arc deposited titanium aluminium nitride films prepared using plasma immersion ion implantation

Cathodic Arc ◽

Titanium Aluminium

Synthesis of aluminum nitride films by plasma immersion ion implantation–deposition using hybrid gas–metal cathodic arc gun

Review of Scientific Instruments ◽

10.1063/1.1646741 ◽

2004 ◽

Vol 75 (3) ◽

pp. 719-724 ◽

Cited By ~ 6

Author(s):

Liru Shen ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Aluminum Nitride ◽

Ion Implantation ◽

Cathodic Arc

Characterization of surface modified α-iron by nitrogen plasma immersion ion implantation: a microstructural study

Materials Science and Engineering A ◽

10.1016/s0921-5093(98)00877-6 ◽

1999 ◽

Vol 262 (1-2) ◽

pp. 289-299 ◽

Cited By ~ 13

Author(s):

Gerard W. Malaczynski ◽

Chi H. Leung ◽

Alaa A. Elmoursi ◽

Aboud H. Hamdi ◽

Albert B. Campbell ◽

...

Keyword(s):

Ion Implantation ◽

Nitrogen Plasma ◽

Microstructural Study ◽

Surface Modified

Optical characterization of TiN produced by metal-plasma immersion ion implantation

10.1016/s0257-8972(01)01082-9 ◽

2001 ◽

Vol 142-144 ◽

pp. 418-423 ◽

Cited By ~ 26

Author(s):

P. Huber ◽

D. Manova ◽

S. Mändl ◽

B. Rauschenbach

Keyword(s):

Ion Implantation ◽

Optical Characterization ◽

Metal Plasma ◽

Electrical characterization of silicon nitride produced by plasma immersion ion implantation

10.1016/s0257-8972(97)00059-5 ◽

1997 ◽

Vol 93 (2-3) ◽

pp. 269-273 ◽

Cited By ~ 7

Author(s):

S.-M. Chen ◽

J.M. Shannon ◽

R.M. Gwilliam ◽

B.J. Sealy

Keyword(s):

Silicon Nitride ◽

Ion Implantation ◽

Electrical Characterization ◽

Characterization of drills implanted with nitrogen plasma immersion ion implantation

10.1016/s0257-8972(98)00383-1 ◽

1998 ◽

Vol 103-104 ◽

pp. 161-167 ◽

Cited By ~ 20

Author(s):

S Mändl ◽

R Günzel ◽

W Möller ◽

R Hilke ◽

E Knösel ◽

...

Keyword(s):

Ion Implantation ◽

Nitrogen Plasma ◽

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

Electron backscatter diffraction characterization of plasma immersion ion implantation effects in stainless steel

10.1016/j.nimb.2012.10.007 ◽

2013 ◽

Vol 295 ◽

pp. 38-41 ◽

Cited By ~ 1

Author(s):

Joel Davis ◽

Ken Short ◽

Richard Wuhrer ◽

Matthew R. Phillips ◽

Gregory R. Lumpkin ◽

...

Keyword(s):

Stainless Steel ◽

Ion Implantation ◽

Electron Backscatter Diffraction ◽

Electron Backscatter ◽

Backscatter Diffraction

Preparation and characterization of copper thin film obtained by metal plasma immersion ion implantation and deposition

Thin Solid Films ◽

10.1016/j.tsf.2018.01.048 ◽

2018 ◽

Vol 649 ◽

pp. 136-141 ◽

Cited By ~ 2

Author(s):

Demetrio Jackson dos Santos ◽

Nathalie Minako Ito ◽

Mara Cristina Lopes de Oliveira ◽

Lara Basílio Tavares ◽

Maria Cecilia Salvadori ◽

...

Keyword(s):

Thin Film ◽

Ion Implantation ◽

Copper Thin Film ◽

Metal Plasma ◽

Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/16/10/007 ◽

2004 ◽

Vol 16 (10) ◽

pp. 1751-1760 ◽

Cited By ~ 18

Author(s):

B K Gan ◽

M M M Bilek ◽

D R McKenzie ◽

Yang Shi ◽

D A Tompsett ◽

...

Keyword(s):

Ion Implantation ◽

Stress Relief ◽

Aluminium Nitride ◽

Texture Formation ◽

Minimisation of intrinsic stress in titanium nitride using a cathodic arc with plasma immersion ion implantation

10.1016/s0257-8972(03)00394-3 ◽

2003 ◽

Vol 174-175 ◽

pp. 76-80 ◽

Cited By ~ 28

Author(s):

S.H.N. Lim ◽

D.G. McCulloch ◽

M.M.M. Bilek ◽

D.R. McKenzie

Keyword(s):

Ion Implantation ◽

Titanium Nitride ◽

Intrinsic Stress ◽

Cathodic Arc

Electrical characterization of a-SiOx:H produced by plasma immersion ion implantation

Solid-State Electronics ◽

10.1016/s0038-1101(98)00290-1 ◽

1999 ◽

Vol 43 (3) ◽

pp. 599-607 ◽

Cited By ~ 1

Author(s):

S.-M. Chen ◽

J.M. Shannon ◽

R.M. Gwilliam ◽

B.J. Sealy

Keyword(s):

Ion Implantation ◽

Electrical Characterization ◽