Preparation and characterization of copper thin film obtained by metal plasma immersion ion implantation and deposition
Keyword(s):
2001 ◽
Vol 142-144
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pp. 418-423
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2005 ◽
Vol 237
(1-2)
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pp. 296-300
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Keyword(s):
2000 ◽
Vol 166-167
◽
pp. 154-158
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Keyword(s):
2004 ◽
Vol 22
(6)
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pp. 2299-2305
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Keyword(s):
2010 ◽
Vol 81
(12)
◽
pp. 124703
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1999 ◽
Vol 262
(1-2)
◽
pp. 289-299
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2001 ◽
Vol 136
(1-3)
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pp. 85-92
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2005 ◽
Vol 17
(17)
◽
pp. 2791-2800
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