Optical characterization of TiN produced by metal-plasma immersion ion implantation

2001 ◽  
Vol 142-144 ◽  
pp. 418-423 ◽  
Author(s):  
P. Huber ◽  
D. Manova ◽  
S. Mändl ◽  
B. Rauschenbach
Keyword(s):  
Ion Implantation ◽  
Optical Characterization ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Preparation and characterization of copper thin film obtained by metal plasma immersion ion implantation and deposition

2018 ◽  
Vol 649 ◽  
pp. 136-141 ◽  
Author(s):  
Demetrio Jackson dos Santos ◽  
Nathalie Minako Ito ◽  
Mara Cristina Lopes de Oliveira ◽  
Lara Basílio Tavares ◽  
Maria Cecilia Salvadori ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Implantation ◽  
Copper Thin Film ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Electrical and optical characterization of defect levels caused in InGaAs by boron ion implantation

1993 ◽  
Vol 80-81 ◽  
pp. 632-635
Author(s):  
Shin'ichi Yamamura ◽  
Tadamasa Kimura ◽  
Shigemi Yugo ◽  
Riichiro Saito ◽  
Michio Murata ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Optical Characterization ◽  
Defect Levels

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Characterization of surface modified α-iron by nitrogen plasma immersion ion implantation: a microstructural study

1999 ◽  
Vol 262 (1-2) ◽  
pp. 289-299 ◽  
Author(s):  
Gerard W. Malaczynski ◽  
Chi H. Leung ◽  
Alaa A. Elmoursi ◽  
Aboud H. Hamdi ◽  
Albert B. Campbell ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Nitrogen Plasma ◽  
Microstructural Study ◽  
Plasma Immersion Ion Implantation ◽  
Surface Modified

Optical characterization of carbon ion implantation into Si and SiGe alloys

1998 ◽  
Author(s):  
Alejandro Perez-Rodriguez ◽  
A. Romano-Rodriguez ◽  
Christoph Serre ◽  
L. Calvo-Barrio ◽  
O. Gonzalez-Varona ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Optical Characterization ◽  
Carbon Ion

Characterization of cathodic arc deposited titanium aluminium nitride films prepared using plasma immersion ion implantation

2005 ◽  
Vol 17 (17) ◽  
pp. 2791-2800 ◽  
Author(s):  
S H N Lim ◽  
D G McCulloch ◽  
M M M Bilek ◽  
D R McKenzie ◽  
S P Russo ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Aluminium Nitride ◽  
Plasma Immersion Ion Implantation ◽  
Cathodic Arc ◽  
Titanium Aluminium
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