Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication

Abstract Hitachi Metals SLD-Magic is a high-performance alloy cold-work tool steel that is characterized by improved mold lifespan and easy mold fabrication. This datasheet provides information on composition, physical properties, hardness, elasticity as well as fatigue. It also includes information on low and high temperature performance as well as heat treating, machining, and joining. Filing Code: TS-802. Producer or source: Hitachi Metals Ltd.

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Mold Fabrication for 3D Dual Damascene Imprinting

Nanoscale Research Letters ◽

10.1007/s11671-010-9540-2 ◽

2010 ◽

Vol 5 (3) ◽

pp. 545-549 ◽

Cited By ~ 10

Author(s):

S. M. Saydur Rahman ◽

Bo Cui

Keyword(s):

Dual Damascene ◽

Mold Fabrication

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Studies in Direct Tooling Using Stereolithography

Journal of Manufacturing Science and Engineering ◽

10.1115/1.538921 ◽

1999 ◽

Vol 122 (2) ◽

pp. 316-322 ◽

Cited By ~ 3

Author(s):

Yun Li ◽

Edward P. Gargiulo ◽

Michael Keefe

Keyword(s):

Product Development ◽

Thermal Characteristics ◽

Thermal Response ◽

High Volume ◽

Production Quality ◽

Physical Models ◽

Part Geometry ◽

Mold Fabrication ◽

Low Volume ◽

Part Production

Rapid prototyping (RP) technologies are valuable for reducing product development cycle times by creating physical models for visual inspection and form-fit studies directly from a 3-D database. However, if the part is meant for volume production, tooling will be necessary. Tool development and fabrication using conventional techniques and materials is time consuming and expensive. Therefore, it is risky to commit to production tooling in the initial stages of product development. Low volume prototyping is highly desirable but requires a small number of parts (hundreds) to be produced quickly and economically. To meet this need, this paper studies direct tooling using the RP technology of stereolithography (SL) to produce photopolymer tools. Without modifications to improve thermal response, SL molds will not be able to produce production-quality parts. This experimental study quantifies the thermal characteristics of an SL mold for a simple part geometry. Several modifications that affect thermal properties are then studied and both thermal response and part quality are quantified. The data indicate that although it is possible to change the thermal response of an SL mold and obtain reasonable parts, the ability to duplicate traditional mold characteristics (and thus simulate part production before committing to high-volume tooling) is probably not practical. Similar results were achieved when using a more realistic final-part geometry on a production mold machine. Although mold process simulation using SL molds could provide useful design guidance for traditional high-volume part production, this work suggests that these SL molds can be used for low-volume part production. By reducing mold fabrication time and costs, low-volume part production could become cost-effective using traditional high-volume manufacturing techniques. [S1087-1357(00)00702-4]

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Optimization of photoresist plating mold fabrication for metal mask patterning

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0000879 ◽

2021 ◽

Vol 39 (2) ◽

pp. 022601

Author(s):

Doreen Hii ◽

Daryosh Vatanparvar ◽

Andrei M. Shkel

Keyword(s):

Metal Mask ◽

Mold Fabrication

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Application of ultrasonic stress relief technology to microinjection mold fabrication

Optics and Precision Engineering ◽

10.3788/ope.20122006.1250 ◽

2012 ◽

Vol 20 (6) ◽

pp. 1250-1256 ◽

Cited By ~ 1

Author(s):

杜立群 DU Li-qun ◽

李成斌 LI Cheng-bin ◽

李永辉 LI Yong-hui ◽

于同敏 YU Tong-min

Keyword(s):

Stress Relief ◽

Mold Fabrication ◽

Ultrasonic Stress Relief

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A Framework of Cooperative Design for Aspheric Glass-Lens Mold

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.97-101.2965 ◽

2010 ◽

Vol 97-101 ◽

pp. 2965-2969

Author(s):

Yong Jian Zhu ◽

Shao Hui Yin ◽

Wei Qing Pan ◽

Yu Feng Fan ◽

Kun Tang

Keyword(s):

Error Compensation ◽

Mechanical Design ◽

Optical Design ◽

Element Analysis ◽

Cooperative Design ◽

Aspheric Glass Lens ◽

Glass Lens ◽

Mold Fabrication ◽

Lens Molding ◽

Analysis Error

The lens molding technology has become a promising fabrication method for glass lens, especially for aspheric glass lens in batch. Because during the real compression molding, the error compensation for mold shape turns very difficult, the mold needs to be repaired repeatedly to meet the requirements of lens molding. To solve this problem, a cooperative design scheme is proposed. However, the scheme is not limited to solving the mold repairing; it also aims to providing the integrated and optimal design for aspheric glass-lens mold. In fact, the cooperative scheme is a collaborative software platform, which integrates with data processing, optical design, finite element analysis, error compensation and mechanical design for lens molding. On this platform, users only need to submit the (camera) lens parameters or measured data of aspheric lens, and then the platform can provide the final mold drawings, which will be input in the CNC software of ultra-precision machine and guide the mold fabrication. Meanwhile, the cooperative platform is Network-based PDM system, so designers could remotely communicate with it and help to finish the mold design jointly. In this case, the cooperative design could tremendously improve the efficiency and accuracy of lens molding.

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