Self-consistent simulation of very high frequency capacitively coupled plasmas
2008 ◽
Vol 17
(3)
◽
pp. 035003
◽
Keyword(s):
Keyword(s):
Keyword(s):
Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas
2009 ◽
Vol 27
(4)
◽
pp. 706-711
◽
Keyword(s):
Keyword(s):
2003 ◽
Vol 42
(Part 2, No. 12B)
◽
pp. L1532-L1534
◽
Keyword(s):
2003 ◽
Vol 43
(1A/B)
◽
pp. L94-L96
◽
Keyword(s):
2004 ◽
Vol 13
(3)
◽
pp. 436-445
◽
Keyword(s):
Keyword(s):