Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 054002)
2015 ◽
Vol 24
(6)
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pp. 069501
Keyword(s):
1999 ◽
Vol 119
(6)
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pp. 866-871
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2019 ◽
Vol 16
(11)
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pp. 1900093
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1975 ◽
Vol 30
(10-11)
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pp. 449-469
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2012 ◽
Vol 206
(23)
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pp. 4952-4958
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2018 ◽
Vol 46
(2)
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pp. 252-262
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1998 ◽
Vol 37
(Part 1, No. 7A)
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pp. 4182-4185
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2011 ◽
pp. 124-128
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2012 ◽
Vol 213
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pp. 139-144
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