Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma
2007 ◽
Vol 9
(1)
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pp. 30-34
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2011 ◽
Vol 39
(11)
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pp. 2536-2537
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Keyword(s):
2007 ◽
Vol 1139
(2)
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pp. 247-253
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Keyword(s):
2018 ◽
Vol 27
(5)
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pp. 055018
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Keyword(s):
1989 ◽
Vol 44
(7)
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pp. 657-666
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