Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms

2020 ◽  
Vol 29 (7) ◽  
pp. 074001
Author(s):  
A Derzsi ◽  
B Horváth ◽  
Z Donkó ◽  
J Schulze
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Surface Processes ◽  
Radio Frequency Discharges

scholarly journals N2–H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: the relevance of plasma-surface interaction

2020 ◽  
Vol 29 (8) ◽  
pp. 085023 ◽  
Author(s):  
Miguel Jiménez-Redondo ◽  
Audrey Chatain ◽  
Olivier Guaitella ◽  
Guy Cernogora ◽  
Nathalie Carrasco ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Surface Interaction ◽  
Capacitively Coupled ◽  
Plasma Surface ◽  
Radio Frequency Discharges

Plasma Ionization in Low-Pressure Radio-Frequency Discharges. Part I: Optical Measurements

2008 ◽  
Vol 36 (4) ◽  
pp. 1382-1383 ◽  
Author(s):  
Deborah O'Connell ◽  
Timo Gans ◽  
Albert Meige ◽  
Peter Awakowicz ◽  
Rod W. Boswell
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Optical Measurements ◽  
Plasma Ionization ◽  
Radio Frequency Discharges

scholarly journals Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 ◽  
Vol 127 (18) ◽  
pp. 181101 ◽  
Author(s):  
S. Wilczek ◽  
J. Schulze ◽  
R. P. Brinkmann ◽  
Z. Donkó ◽  
J. Trieschmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Electron Dynamics ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges
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