Comprehensive understanding of the ignition process of a pulsed capacitively coupled radio frequency discharge: the effect of power-off duration

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ac0b56 ◽

2021 ◽

Author(s):

Xiang-Yu Wang ◽

Jia-Rui Liu ◽

Yong-Xin Liu ◽

Zoltan Donko ◽

Quan-Zhi Zhang ◽

...

Keyword(s):

Radio Frequency ◽

Ignition Process ◽

Comprehensive Understanding ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/22/022 ◽

2007 ◽

Vol 40 (22) ◽

pp. 7008-7018 ◽

Cited By ~ 92

Author(s):

J Schulze ◽

T Gans ◽

D O'Connell ◽

U Czarnetzki ◽

A R Ellingboe ◽

...

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Plasma Parameters ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Hydro-carbon material design in a capacitively coupled radio-frequency discharge

Plasma Processes and Polymers ◽

10.1002/ppap.201700152 ◽

2017 ◽

Vol 15 (3) ◽

pp. 1700152 ◽

Cited By ~ 1

Author(s):

Slobodan Mitic ◽

Stéphane Coussan ◽

Céline Martin ◽

Lénaïc Couëdel

Keyword(s):

Radio Frequency ◽

Carbon Material ◽

Material Design ◽

Capacitively Coupled ◽

Hydro Carbon ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Detection of particles of less than 5 nm in diameter formed in an argon–silane capacitively coupled radio-frequency discharge

Applied Physics Letters ◽

10.1063/1.1425431 ◽

2001 ◽

Vol 79 (26) ◽

pp. 4301-4303 ◽

Cited By ~ 88

Author(s):

L. Boufendi ◽

J. Gaudin ◽

S. Huet ◽

G. Viera ◽

M. Dudemaine

Keyword(s):

Radio Frequency ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Sheath motion in a capacitively coupled radio frequency discharge

IEEE Transactions on Plasma Science ◽

10.1109/27.90327 ◽

1991 ◽

Vol 19 (4) ◽

pp. 619-627 ◽

Cited By ~ 20

Author(s):

B.P. Wood ◽

M.A. Lieberman ◽

A.J. Lichtenberg

Keyword(s):

Radio Frequency ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Influences of Gap Distance on Plasma Characteristics in Narrow Gap Capacitively Coupled Radio-Frequency Discharge

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.795 ◽

2004 ◽

Vol 43 (2) ◽

pp. 795-799 ◽

Cited By ~ 11

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Radio Frequency ◽

Narrow Gap ◽

Capacitively Coupled ◽

Plasma Characteristics ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Journal of Applied Physics ◽

10.1063/1.1563820 ◽

2003 ◽

Vol 93 (9) ◽

pp. 5025-5033 ◽

Cited By ~ 16

Author(s):

E. Neyts ◽

M. Yan ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide

Applied Physics Letters ◽

10.1063/1.1827353 ◽

2004 ◽

Vol 85 (21) ◽

pp. 4875-4877 ◽

Cited By ~ 15

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Discharge Plasma ◽

Secondary Electron Emission ◽

High Density ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Two-dimensional PIC–MCC simulations of a capacitively coupled radio frequency discharge in methane

Plasma Sources Science and Technology ◽

10.1088/0963-0252/14/2/001 ◽

2005 ◽

Vol 14 (2) ◽

pp. 209-218 ◽

Cited By ~ 14

Author(s):

A L Alexandrov ◽

I V Schweigert

Keyword(s):

Radio Frequency ◽

Two Dimensional ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Magnetic control of nonlinear electron resonance heating in a capacitively coupled radio frequency discharge

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab53a0 ◽

2019 ◽

Vol 28 (11) ◽

pp. 115021 ◽

Cited By ~ 3

Author(s):

M Oberberg ◽

D Engel ◽

B Berger ◽

C Wölfel ◽

D Eremin ◽

...

Keyword(s):

Radio Frequency ◽

Magnetic Control ◽

Electron Resonance ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)

Transition between different modes of a capacitively coupled radio frequency discharge in CH/sub 4/ in one- and two-dimensional PIC-MCC Simulations

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.845242 ◽

2005 ◽

Vol 33 (2) ◽

pp. 615-623 ◽

Cited By ~ 6

Author(s):

I.V. Schweigert ◽

A.L. Alexandrov

Keyword(s):

Radio Frequency ◽

Two Dimensional ◽

Capacitively Coupled ◽

Radio Frequency Discharge

Get full-text (via PubEx)