Modeling of DC glow discharges in low-pressure CO2

2001 ◽

Vol 56 (5) ◽

pp. 465-486 ◽

Cited By ~ 48

Author(s):

Kazuaki Wagatsuma

Keyword(s):

Low Pressure ◽

Emission Characteristics ◽

Mixed Gas ◽

Glow Discharges

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Experimental investigations of glow discharges in hollow cathode geometries at low pressure

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.845929 ◽

2005 ◽

Vol 33 (2) ◽

pp. 384-385 ◽

Cited By ~ 2

Author(s):

T. Callegari ◽

F. Gegot ◽

L.C. Pitchford ◽

J. Galy ◽

J.P. Boeuf

Keyword(s):

Hollow Cathode ◽

Low Pressure ◽

Experimental Investigations ◽

Glow Discharges

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Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling

IEEE Transactions on Plasma Science ◽

10.1109/tps.2018.2818164 ◽

2018 ◽

Vol 46 (5) ◽

pp. 1738-1746 ◽

Cited By ~ 1

Author(s):

Tagra Samir ◽

Yue Liu ◽

Lulu Zhao

Keyword(s):

Low Pressure ◽

Gas Pressure ◽

Fluid Modeling ◽

Neutral Gas ◽

Glow Discharges ◽

Plasma Characteristics

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Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon

Physics of Plasmas ◽

10.1063/1.4997615 ◽

2017 ◽

Vol 24 (8) ◽

pp. 083515 ◽

Cited By ~ 1

Keyword(s):

Low Pressure ◽

Plasma Dynamics ◽

Fluid Modeling ◽

Glow Discharges ◽

Pulsed Rf

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Secondary ion mass spectrometry measurements of deuterium penetration into silicon by low pressure RF glow discharges

Radiation Effects and Defects in Solids ◽

10.1080/10420158908213004 ◽

1989 ◽

Vol 111-112 (1-2) ◽

pp. 299-308 ◽

Cited By ~ 1

Author(s):

Gottlieb S. Oehrlein ◽

Gerald J. Scilla

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Low Pressure ◽

Glow Discharges ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Simulation of the shielding of dust particles in low pressure glow discharges

Applied Physics Letters ◽

10.1063/1.109440 ◽

1993 ◽

Vol 62 (18) ◽

pp. 2197-2199 ◽

Cited By ~ 24

Author(s):

Seung J. Choi ◽

Mark J. Kushner

Keyword(s):

Low Pressure ◽

Dust Particles ◽

Glow Discharges

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Chemical kinetics in low pressure acetylene radio frequency glow discharges

Journal of Applied Physics ◽

10.1063/1.366333 ◽

1997 ◽

Vol 82 (10) ◽

pp. 4763-4771 ◽

Cited By ~ 58

Author(s):

James R. Doyle

Keyword(s):

Radio Frequency ◽

Chemical Kinetics ◽

Low Pressure ◽

Glow Discharges

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Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges

Physical Review Letters ◽

10.1103/physrevlett.66.1469 ◽

1991 ◽

Vol 66 (11) ◽

pp. 1469-1472 ◽

Cited By ~ 87

Author(s):

M. Surendra ◽

D. B. Graves

Keyword(s):

Acoustic Waves ◽

Low Pressure ◽

Capacitively Coupled ◽

Electron Acoustic Waves ◽

Glow Discharges ◽

Electron Acoustic

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Pressure Considerations Associated with Ion Sampling from Low-Pressure Glow Discharges

Journal of Vacuum Science and Technology ◽

10.1116/1.1316580 ◽

1972 ◽

Vol 9 (1) ◽

pp. 27-27

Author(s):

J. W. Coburn ◽

E. Kay

Keyword(s):

Low Pressure ◽

Glow Discharges

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A particle-in-cell simulation of dust charging and shielding in low pressure glow discharges

IEEE Transactions on Plasma Science ◽

10.1109/27.279017 ◽

1994 ◽

Vol 22 (2) ◽

pp. 138-150 ◽

Cited By ~ 61

Author(s):

S.J. Choi ◽

M.J. Kushner

Keyword(s):

Low Pressure ◽

Particle In Cell ◽

Glow Discharges ◽

Cell Simulation ◽

Dust Charging

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Modeling of DC glow discharges in low-pressure CO2

Emission characteristics of mixed gas plasmas in low-pressure glow discharges

Experimental investigations of glow discharges in hollow cathode geometries at low pressure

Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling

Fluid modeling of plasma dynamics in pulsed RF capacitive glow discharges in low pressure argon

Secondary ion mass spectrometry measurements of deuterium penetration into silicon by low pressure RF glow discharges

Simulation of the shielding of dust particles in low pressure glow discharges

Chemical kinetics in low pressure acetylene radio frequency glow discharges

Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges

Pressure Considerations Associated with Ion Sampling from Low-Pressure Glow Discharges

A particle-in-cell simulation of dust charging and shielding in low pressure glow discharges

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