Low contact resistivity of Ti/TiN/Al for NiSi2 on epitaxial Si:P structure at full low temperature process below 450oC

2021 ◽  
Author(s):  
Shuang Sun ◽  
JianHuan Wang ◽  
Ran Bi ◽  
HaiXia Li ◽  
Xiaokang Li ◽  
...  
Keyword(s):  
Low Temperature ◽  
Contact Resistivity ◽  
Low Temperature Process

Integrated low-temperature process for the fabrication of amorphous Si nanoparticles embedded in Al2 O3 for non-volatile memory application

2016 ◽  
Vol 213 (9) ◽  
pp. 2446-2451 ◽  
Author(s):  
Klemens Ilse ◽  
Thomas Schneider ◽  
Johannes Ziegler ◽  
Alexander Sprafke ◽  
Ralf B. Wehrspohn
Keyword(s):  
Low Temperature ◽  
Si Nanoparticles ◽  
Non Volatile Memory ◽  
Amorphous Si ◽  
Volatile Memory ◽  
Low Temperature Process

Low temperature process to create brick

2008 ◽  
Vol 22 (6) ◽  
pp. 1114-1121 ◽  
Author(s):  
Mouhamadou Bassir Diop ◽  
Michael W. Grutzeck
Keyword(s):  
Low Temperature ◽  
Low Temperature Process

GaAs heteroepitaxy on an epitaxial Si surface with a low‐temperature process

1993 ◽  
Vol 63 (14) ◽  
pp. 1963-1965 ◽  
Author(s):  
Hidefumi Mori ◽  
Masami Tachikawa ◽  
Mitsuru Sugo ◽  
Yoshio Itoh
Keyword(s):  
Low Temperature ◽  
Low Temperature Process

scholarly journals NEW TECHNOLOGY FOR HARDENING READY-MADE TOOLS IN AQUAEOUS DISPERSED MEDIA

2017 ◽  
Vol 23 (1) ◽  
pp. 87
Author(s):  
Alexander A. Shmatov ◽  
Ľubomír Šooš ◽  
Zdenko Krajný
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Solid Lubricant ◽  
New Technology ◽  
Aqueous Media ◽  
Hard Alloys ◽  
Refractory Materials ◽  
Structure And Properties ◽  
Refractory Compounds ◽  
Low Temperature Process

<p class="AMSmaintext"><span lang="EN-US">The new method for hardening ready-made steels, hard alloys and diamond tools is developed: low-temperature process for producing thin-film solid lubricant coatings by hydro chemical treatment in specially prepared aqueous media of nanosized hard refractory compounds and subsequent tempering. The main advantages of the method over known processes are presented. The principles for dispersion of refractory materials are formulated. The structure and properties of the obtained coatings are examined. <br /></span></p>

New low temperature process of CO2 recovery from natural gases

2014 ◽  
Author(s):  
Salavat Z. Imaev ◽  
Lev A. Bagirov ◽  
Vasily E. Borisov ◽  
Evgeny V. Voytenkov
Keyword(s):  
Low Temperature ◽  
Natural Gases ◽  
Co2 Recovery ◽  
Low Temperature Process
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