Low contact resistivity of Ti/TiN/Al for NiSi2 on epitaxial Si:P structure at full low temperature process below 450oC

Author(s):  
Shuang Sun ◽  
JianHuan Wang ◽  
Ran Bi ◽  
HaiXia Li ◽  
Xiaokang Li ◽  
...  

2016 ◽  
Vol 63 (12) ◽  
pp. 5060-5063 ◽  
Author(s):  
Chih-Hung Lu ◽  
Tuo-Hung Hou ◽  
Tung-Ming Pan


2016 ◽  
Vol 213 (9) ◽  
pp. 2446-2451 ◽  
Author(s):  
Klemens Ilse ◽  
Thomas Schneider ◽  
Johannes Ziegler ◽  
Alexander Sprafke ◽  
Ralf B. Wehrspohn


2008 ◽  
Vol 22 (6) ◽  
pp. 1114-1121 ◽  
Author(s):  
Mouhamadou Bassir Diop ◽  
Michael W. Grutzeck


ACS Omega ◽  
2021 ◽  
Vol 6 (12) ◽  
pp. 8570-8577
Author(s):  
Ryo Muraguchi ◽  
Wataru Futagami ◽  
Yuko Hakoshima ◽  
Keisuke Awaya ◽  
Shintaro Ida


2012 ◽  
Vol 101 (25) ◽  
pp. 251905 ◽  
Author(s):  
M. Seita ◽  
A. Reiser ◽  
R. Spolenak


1993 ◽  
Vol 63 (14) ◽  
pp. 1963-1965 ◽  
Author(s):  
Hidefumi Mori ◽  
Masami Tachikawa ◽  
Mitsuru Sugo ◽  
Yoshio Itoh


2017 ◽  
Vol 23 (1) ◽  
pp. 87
Author(s):  
Alexander A. Shmatov ◽  
Ľubomír Šooš ◽  
Zdenko Krajný

<p class="AMSmaintext"><span lang="EN-US">The new method for hardening ready-made steels, hard alloys and diamond tools is developed: low-temperature process for producing thin-film solid lubricant coatings by hydro chemical treatment in specially prepared aqueous media of nanosized hard refractory compounds and subsequent tempering. The main advantages of the method over known processes are presented. The principles for dispersion of refractory materials are formulated. The structure and properties of the obtained coatings are examined. <br /></span></p>





2014 ◽  
Author(s):  
Salavat Z. Imaev ◽  
Lev A. Bagirov ◽  
Vasily E. Borisov ◽  
Evgeny V. Voytenkov


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