Fluid simulation of inductively coupled Ar/O
2
plasmas: Comparisons with experiment
2016 ◽
Vol 65
(7)
◽
pp. 1211-1217
Keyword(s):
1999 ◽
Vol 27
(1)
◽
pp. 54-55
◽
1999 ◽
Vol 38
(Part 1, No. 12A)
◽
pp. 6890-6895
◽
Keyword(s):
Keyword(s):
Keyword(s):
2016 ◽
Vol 65
(8)
◽
pp. 1376-1382