Fluid simulation of the superimposed dual-frequency source effect in inductively coupled discharges

2021 ◽  
Vol 28 (11) ◽  
pp. 113504
Author(s):  
Xiao-Yan Sun ◽  
Yu-Ru Zhang ◽  
You-Nian Wang ◽  
Jian-Xin He
Keyword(s):  
Fluid Simulation ◽  
Dual Frequency ◽  
Source Effect ◽  
Inductively Coupled ◽  
Frequency Source

Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma

2019 ◽  
Vol 26 (4) ◽  
pp. 043503 ◽  
Author(s):  
Xiao-Yan Sun ◽  
Yu-Ru Zhang ◽  
Sen Chai ◽  
You-Nian Wang ◽  
Jian-Xin He
Keyword(s):  
Inductively Coupled Plasma ◽  
Fluid Simulation ◽  
Dual Frequency ◽  
Inductively Coupled

Fluid simulation of inductively coupled Ar/O 2 plasmas: Comparisons with experiment

2015 ◽  
Vol 24 (9) ◽  
pp. 095203
Author(s):  
Yan-Hui Wang ◽  
Liu Wei ◽  
Yu-Ru Zhang ◽  
You-Nian Wang
Keyword(s):  
Fluid Simulation ◽  
Inductively Coupled

scholarly journals Multi-fluid simulation models for inductively coupled plasma sources

2017 ◽  
Author(s):  
Madhusudhan Kundrapu ◽  
Seth A. Veitzer ◽  
Peter H. Stoltz ◽  
Kristian R. C. Beckwith ◽  
Jonathan Smith
Keyword(s):  
Inductively Coupled Plasma ◽  
Simulation Models ◽  
Fluid Simulation ◽  
Plasma Sources ◽  
Inductively Coupled

Characteristics of a Collisional Sheath Biased by a Dual Frequency Source

2011 ◽  
Vol 13 (5) ◽  
pp. 513-518 ◽  
Author(s):  
Hong Zhang ◽  
Zhongling Dai ◽  
Younian Wang
Keyword(s):  
Dual Frequency ◽  
Frequency Source
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