Two-dimensional fluid simulation of inductively coupled N2/NH3/SiH4 discharge

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ac2b62 ◽

2021 ◽

Author(s):

Ju-Hong Cha ◽

Kwon-Sang Seo ◽

Sang-Woo Kim ◽

Ho-Jun Lee

Keyword(s):

Fluid Simulation ◽

Two Dimensional ◽

Inductively Coupled

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Two-Dimensional Fluid Simulation and Langmuir Probe Measurement of a Planar Inductively Coupled Oxygen Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.6890 ◽

1999 ◽

Vol 38 (Part 1, No. 12A) ◽

pp. 6890-6895 ◽

Author(s):

Hyun Jin Yoon ◽

Tae Hun Chung ◽

Dong Cheol Seo

Keyword(s):

Langmuir Probe ◽

Oxygen Plasma ◽

Fluid Simulation ◽

Probe Measurement ◽

Two Dimensional ◽

Inductively Coupled

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Two-dimensional fluid simulation of pulsed-power inductively coupled Ar/H2 discharge

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/abdbe4 ◽

2021 ◽

Vol 54 (16) ◽

pp. 165205

Author(s):

Ju-Hong Cha ◽

Kwon-Sang Seo ◽

Jeehun Jeong ◽

Ho-Jun Lee

Keyword(s):

Pulsed Power ◽

Fluid Simulation ◽

Two Dimensional ◽

Inductively Coupled

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Two-dimensional nonlocal heating theory of planar-type inductively coupled plasma discharge

Physical Review E ◽

10.1103/physreve.55.7536 ◽

1997 ◽

Vol 55 (6) ◽

pp. 7536-7549 ◽

Author(s):

N. S. Yoon ◽

S. M. Hwang ◽

Duk-In Choi

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Discharge ◽

Two Dimensional ◽

Inductively Coupled ◽

Nonlocal Heating

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Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. II. Ar/Cl2 pulsed plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1434965 ◽

2002 ◽

Vol 20 (2) ◽

pp. 325-334 ◽

Author(s):

Pramod Subramonium ◽

Mark J. Kushner

Keyword(s):

Two Dimensional ◽

Inductively Coupled Plasmas ◽

Pulsed Plasmas ◽

Inductively Coupled ◽

Dimensional Modeling ◽

Coupled Plasmas

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Two-dimensional (weak anion exchange chromatography-gel electrophoresis) separations coupling to inductively coupled plasma mass spectrometry strategy for analysis of metalloproteins

Talanta ◽

10.1016/j.talanta.2018.03.037 ◽

2018 ◽

Vol 184 ◽

pp. 404-410 ◽

Author(s):

Xueting Yan ◽

Bin He ◽

Dingyi Wang ◽

Ligang Hu ◽

Lihong Liu ◽

...

Keyword(s):

Mass Spectrometry ◽

Anion Exchange ◽

Gel Electrophoresis ◽

Inductively Coupled Plasma ◽

Anion Exchange Chromatography ◽

Exchange Chromatography ◽

Two Dimensional ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Weak Anion Exchange Chromatography

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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2135382 ◽

2011 ◽

Vol 39 (11) ◽

pp. 2536-2537 ◽

Author(s):

Hyo-Chang Lee ◽

Young-Cheol Kim ◽

Chin-Wook Chung

Keyword(s):

Plasma Density ◽

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Inductively Coupled ◽

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Identification of selenium species in selenium-enriched Lens esculenta plants by using two-dimensional liquid chromatography-inductively coupled plasma mass spectrometry and [77Se]selenomethionine selenium oxide spikes

Journal of Chromatography A ◽

10.1016/j.chroma.2006.11.031 ◽

2007 ◽

Vol 1139 (2) ◽

pp. 247-253 ◽

Author(s):

Zoyne Pedrero ◽

Jorge Ruiz Encinar ◽

Yolanda Madrid ◽

Carmen Cámara

Keyword(s):

Mass Spectrometry ◽

Liquid Chromatography ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Lens Esculenta ◽

Selenium Species ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

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Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar

Physical Review E ◽

10.1103/physreve.58.7823 ◽

1998 ◽

Vol 58 (6) ◽

pp. 7823-7830 ◽

Author(s):

Masahiro Tadokoro ◽

Hajime Hirata ◽

Nobuhiko Nakano ◽

Zoran Lj. Petrović ◽

Toshiaki Makabe

Keyword(s):

Density Distribution ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled

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Two-dimensional modeling of high plasma density inductively coupled sources for materials processing

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587101 ◽

1994 ◽

Vol 12 (1) ◽

pp. 461 ◽

Author(s):

Peter L. G. Ventzek

Keyword(s):

Plasma Density ◽

High Plasma ◽

Materials Processing ◽

Two Dimensional ◽

Inductively Coupled ◽

Dimensional Modeling ◽

High Plasma Density

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Two-Dimensional Fluid Simulation for Implosion Experiments with the GEKKO XII Green Laser System

Springer Proceedings in Physics - Short-Wavelength Lasers and Their Applications ◽

10.1007/978-3-642-74088-6_42 ◽

1988 ◽

pp. 307-313 ◽

Author(s):

H. Takabe

Keyword(s):

Laser System ◽

Green Laser ◽

Fluid Simulation ◽

Two Dimensional

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