Numerical study on discharge characteristics influenced by secondary electron emission in capacitive RF argon glow discharges by fluid modeling
2002 ◽
Vol 11
(1)
◽
pp. 27-36
◽
Keyword(s):
1989 ◽
Vol 22
(12)
◽
pp. 1840-1847
◽
Keyword(s):
1977 ◽
Vol 35
◽
pp. 2-5