Effects of secondary electron emission on plasma characteristics in dual-frequency atmospheric pressure helium discharge by fluid modeling

In this paper the influence of secondary emission on the characteristics of RF plasmas has been studied. An asymmetrical dual-frequency capacitively coupled plasma reactor has been modeled with one dimensional PIC/MCC (Particle in Cell with Implemented Monte Carlo Collisions) code. The main feature of the modeling code represents the realistic model of the ion-induced secondary electron emission. Secondary emission of electrons is one of the important processes that effects the characteristics of rf plasmas. For modeling the secondary yield per ion, we have used equations proposed by Phelps and Petrovic (Plasma Sources Sci. Technol. 8 (1999) R21-R44) for differently treated metal surfaces. In the model, the energy dependence of the yields per ion for differently treated metal surfaces has been implemented. Results are compared for yields for the so called ?dirty? and ?clean? surfaces, and the spatial profiles of charged particles and ion energy distributions were observed. The simulation results indicate that the plasma characteristics are greatly affected by the ion-induced secondary emission, changing the overall parameters of dual-frequency capacitively coupled plasma reactors especially in applications as etching devices. Conclusion is that an exact model of the secondary electron emission should be included, as to ensure better agreement between simulation and experiment.

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Ar/SF6 plasma simulation for dual-frequency capacitively coupled plasma incorporating gas flow simulation and secondary electron emission

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ac1eab ◽

2021 ◽

Author(s):

Shigeyuki TAKAGI ◽

Suguru Kawamura ◽

Makoto SEKINE

Keyword(s):

Electron Emission ◽

Gas Flow ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Flow Simulation ◽

Plasma Simulation ◽

Dual Frequency ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Historical Introduction

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100077670 ◽

1977 ◽

Vol 35 ◽

pp. 2-5

Author(s):

R. D. Heidenreich

Keyword(s):

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

50Th Anniversary ◽

Secondary Emission ◽

Wave Nature ◽

Nobel Prize In Physics ◽

Primary Electrons ◽

The U.S ◽

Mutual Agreement

This program has been organized by the EMSA to commensurate the 50th anniversary of the experimental verification of the wave nature of the electron. Davisson and Germer in the U.S. and Thomson and Reid in Britian accomplished this at about the same time. Their findings were published in Nature in 1927 by mutual agreement since their independent efforts had led to the same conclusion at about the same time. In 1937 Davisson and Thomson shared the Nobel Prize in physics for demonstrating the wave nature of the electron deduced in 1924 by Louis de Broglie.The Davisson experiments (1921-1927) were concerned with the angular distribution of secondary electron emission from nickel surfaces produced by 150 volt primary electrons. The motivation was the effect of secondary emission on the characteristics of vacuum tubes but significant deviations from the results expected for a corpuscular electron led to a diffraction interpretation suggested by Elasser in 1925.

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