scholarly journals Ion-plasma methods of formation of piezosemiconductor ZnO thin films for acoustoelectronics and optoelectronics

2019 ◽  
Vol 1281 ◽  
pp. 012025
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L V Grigoryev ◽  
I S Morozov ◽  
N V Zhuravlev ◽  
V G Nefedov ◽  
O V Shakin
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...  

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