Control of the structure and stress state of thin films and coatings in the process of their preparation by ion-plasma methods
2011 ◽
Vol 53
(7)
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pp. 1464-1473
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2019 ◽
Vol 1281
◽
pp. 012025
2020 ◽
Vol 14
(5)
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pp. 929-934
2012 ◽
Vol 54
(11)
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pp. 1232-1240
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2019 ◽
Vol 1393
◽
pp. 012142
2009 ◽
Vol 30
(1)
◽
pp. 62-75
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