Diamond-Like Carbon for the Fast Timing MPGD

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

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Chemical structure of diamond-like carbon thin films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010017668x ◽

1990 ◽

Vol 48 (4) ◽

pp. 710-711

Author(s):

N.-H. Cho ◽

K.M. Krishnan ◽

D.B. Bogy

Keyword(s):

Electrical Resistivity ◽

Chemical Structure ◽

Diamond Like Carbon ◽

Chemical Structures ◽

Sputtering Power ◽

Data Aquisition ◽

Equilibrium Phases ◽

Electron Energy Loss ◽

Power Densities ◽

Preparation Techniques

Diamond-like carbon (DLC) films have attracted much attention due to their useful properties and applications. These properties are quite variable depending on film preparation techniques and conditions, DLC is a metastable state formed from highly non-equilibrium phases during the condensation of ionized particles. The nature of the films is therefore strongly dependent on their particular chemical structures. In this study, electron energy loss spectroscopy (EELS) was used to investigate how the chemical bonding configurations of DLC films vary as a function of sputtering power densities. The electrical resistivity of the films was determined, and related to their chemical structure.DLC films with a thickness of about 300Å were prepared at 0.1, 1.1, 2.1, and 10.0 watts/cm2, respectively, on NaCl substrates by d.c. magnetron sputtering. EEL spectra were obtained from diamond, graphite, and the films using a JEOL 200 CX electron microscope operating at 200 kV. A Gatan parallel EEL spectrometer and a Kevex data aquisition system were used to analyze the energy distribution of transmitted electrons. The electrical resistivity of the films was measured by the four point probe method.

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Metal incorporation into diamond-like carbon films from single source metalorganic precursors

Solid State Ionics ◽

10.1016/s0167-2738(97)00282-8 ◽

1997 ◽

Vol 101-103 (1-2) ◽

pp. 91-96

Author(s):

W Luithardt

Keyword(s):

Carbon Films ◽

Diamond Like Carbon ◽

Single Source ◽

Metal Incorporation

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Field Emission from Pure and Nitrogen-Incorporated Diamond-Like-Carbon Films

Journal de Physique IV (Proceedings) ◽

10.1051/jp4:1996514 ◽

1996 ◽

Vol 06 (C5) ◽

pp. C5-91-C5-95 ◽

Cited By ~ 1

Author(s):

S. Lee ◽

B. Chung ◽

T.-Y. Ko ◽

H. Cho ◽

D. Jeon ◽

...

Keyword(s):

Field Emission ◽

Carbon Films ◽

Diamond Like Carbon

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Application of Capillary Discharge Technique for Deposition of Diamond-Like Carbon Thin Films (2nd Report)

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.133.293 ◽

2013 ◽

Vol 133 (5) ◽

pp. 293-299

Author(s):

Kiyotoshi Fujii ◽

Etsuo Fujiwara ◽

Masayoshi Shimizu ◽

Shozo Inoue

Keyword(s):

Thin Films ◽

Capillary Discharge ◽

Diamond Like Carbon ◽

Carbon Thin Films

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Synthesis of Diamond Like Carbon Films Deposited by the Ionization Vapor Method and Development of its Semiconductive Devices Fabricated by the Focused Ga-ion Beam Implantation

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.137.584 ◽

2017 ◽

Vol 137 (10) ◽

pp. 584-589

Author(s):

Satoshi Kurumi ◽

Yusuke Takahara ◽

Takafumi Ohno ◽

Ken-ichi Matsuda ◽

Kaoru Suzuki

Keyword(s):

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Ion Beam Implantation ◽

Vapor Method

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Microstructure Evolution Induced by Ultraviolet Light Irradiation in Ti-Si Codoped Diamond-like Carbon films

Journal of Inorganic Materials ◽

10.15541/jim20130635 ◽

2014 ◽

Vol 29 (9) ◽

pp. 941

Author(s):

JIANG Jin-Long ◽

WANG Qiong ◽

HUANG Hao ◽

ZHANG Xia ◽

WANG Yu-Bao ◽

...

Keyword(s):

Ultraviolet Light ◽

Microstructure Evolution ◽

Carbon Films ◽

Light Irradiation ◽

Diamond Like Carbon ◽

Ultraviolet Light Irradiation

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An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

MRS Proceedings ◽

10.1557/proc-719-f8.36 ◽

2002 ◽

Vol 719 ◽

Author(s):

Myoung-Woon Moon ◽

Kyang-Ryel Lee ◽

Jin-Won Chung ◽

Kyu Hwan Oh

Keyword(s):

Cross Sections ◽

Focused Ion Beam ◽

Imaging System ◽

Ion Beam ◽

Carbon Films ◽

Diamond Like Carbon ◽

Glass Substrates ◽

Atomic Force ◽

Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

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