Investigation of thickness uniformity of thin metal films by using α-particle energy loss method and successive scanning measurements
2017 ◽
Vol 12
(03)
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pp. T03001-T03001
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1985 ◽
Vol 121
(3)
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pp. 239-244
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1996 ◽
Vol 54
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pp. 358-359
1997 ◽
Vol 167
(6)
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pp. 623
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2016 ◽
Vol 75
(3)
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pp. 201-213
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2006 ◽
Vol 72
(718)
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pp. 880-885
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