Surface morphology and dislocation characteristics near the surface of 4H-SiC wafer using multi-directional scanning transmission electron microscopy
2017 ◽
Vol 66
(5)
◽
pp. 337-347
◽
1980 ◽
Vol 38
◽
pp. 242-245
2016 ◽
Vol 34
(4)
◽
pp. 041602
◽
2011 ◽
Vol 111
(8)
◽
pp. 1144-1154
◽
2010 ◽
Vol 16
(S2)
◽
pp. 80-81
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