Device Isolation in Hybrid Field-Effect Transistors by Semiconductor Micropatterning Using Picosecond Lasers
Robert M. Ireland
◽
Yu Liu
◽
Josef W. Spalenka
◽
Supriya Jaiswal
◽
Kenshi Fukumitsu
◽
...
1981 ◽
Vol 42
(C4)
◽
pp. C4-423-C4-432
◽
P. G. Le Comber
◽
A. J. Snell
◽
K. D. Mackenzie
◽
W. E. Spear
N.Y. Baturina
◽
I.V. Kalienko
Takeomi Morita
◽
Syuichi Nagamatsu
◽
Vipul Singh
◽
Shinya Oku
◽
Wataru Takashima
◽
...
Takafumi Uemura
◽
Masakazu Yamagishi
◽
Yukihiro Tominari
◽
Jun Takeya
M. Uno
◽
I. Doi
◽
K. Takimiya
◽
Jun Takeya
2012 ◽
Vol E95.C
(5)
◽
pp. 885-890
◽
Min LIAO
◽
Hiroshi ISHIWARA
◽
Shun-ichiro OHMI
2002 ◽
Vol 58
(7-8)
◽
pp. 9
S. A. Zuev
◽
V. V. Starostenko
◽
A. A. Shadrin
1982 ◽
Vol 42
◽
pp. 35-41
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