Observtion of an oxygen-related mobility-gap defect in ion-implanted hydrogenated amorphous silicon films

1987 ◽  
Vol 35 (8) ◽  
pp. 4141-4144 ◽  
Author(s):  
C. E. Michelson ◽  
A. V. Gelatos ◽  
J. D. Cohen ◽  
J. P. Harbison
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous ◽  
Mobility Gap ◽  
Ion Implanted

XeF Excimer-Laser Activation of Ion-Implanted Dopants in Hydrogenated Amorphous-Silicon Films

1995 ◽  
Vol 34 (Part 2, No. 4B) ◽  
pp. L479-L482 ◽  
Author(s):  
Chang-Dong Kim ◽  
Masakiyo Matsumura
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous ◽  
Ion Implanted

Drive‐level capacitance profiling: Its application to determining gap state densities in hydrogenated amorphous silicon films

1985 ◽  
Vol 47 (4) ◽  
pp. 412-414 ◽  
Author(s):  
C. E. Michelson ◽  
A. V. Gelatos ◽  
J. D. Cohen
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Drive Level ◽  
Silicon Films ◽  
State Densities ◽  
Hydrogenated Amorphous ◽  
Gap State

Catalytic doping of phosphorus and boron atoms on hydrogenated amorphous silicon films

2016 ◽  
Vol 55 (4S) ◽  
pp. 04ES05 ◽  
Author(s):  
Junichi Seto ◽  
Keisuke Ohdaira ◽  
Hideki Matsumura
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Hydrogenated Amorphous Silicon Films Prepared By rf Sputtering In He/H2

1986 ◽  
Author(s):  
M L. Albers ◽  
H R. Shanks ◽  
J Shinar
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Rf Sputtering ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Photoconductivity and trapping parameters in hydrogenated amorphous silicon films

1983 ◽  
Vol 9 (1-3) ◽  
pp. 295-300
Author(s):  
S. Galassini ◽  
G. Micocci ◽  
C. Pennetta ◽  
A. Rizzo ◽  
A. Tepore ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Hydrogenated Amorphous

Substrate temperature effect on the stability of hydrogenated amorphous silicon films deposited at high rates

1995 ◽  
Vol 78 (1) ◽  
pp. 317-320 ◽  
Author(s):  
J. P. Kleider ◽  
C. Longeaud ◽  
M. Barranco‐Diaz ◽  
P. Morin ◽  
P. Roca i Cabarrocas
Keyword(s):  
Substrate Temperature ◽  
Temperature Effect ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
The Stability ◽  
Hydrogenated Amorphous

Interaction of hydrogenated amorphous silicon films with transparent conductive films

1983 ◽  
Vol 54 (6) ◽  
pp. 3269-3271 ◽  
Author(s):  
M. Kitagawa ◽  
K. Mori ◽  
S. Ishihara ◽  
M. Ohno ◽  
T. Hirao ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Silicon Films ◽  
Transparent Conductive Films ◽  
Conductive Films ◽  
Hydrogenated Amorphous
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