Diffusion-reaction modeling of silicon oxide interlayer growth during thermal annealing of high dielectric constant materials on silicon
2002 ◽
pp. 49-64
2009 ◽
Vol 52
(8)
◽
pp. 2180-2185
◽
2003 ◽
Vol 51
(4)
◽
pp. 1062-1066
◽