scholarly journals Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

2016 ◽  
Vol 49 (3) ◽  
pp. 823-834 ◽  
Author(s):  
Hyo Seon Suh ◽  
Xuanxuan Chen ◽  
Paulina A. Rincon-Delgadillo ◽  
Zhang Jiang ◽  
Joseph Strzalka ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Grazing Incidence ◽  
Line Edge Roughness ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Edge Roughness ◽  
Average Shape ◽  
Polymer Gratings

Grazing-incidence small-angle X-ray scattering (GISAXS) is increasingly used for the metrology of substrate-supported nanoscale features and nanostructured films. In the case of line gratings, where long objects are arranged with a nanoscale periodicity perpendicular to the beam, a series of characteristic spots of high-intensity (grating truncation rods, GTRs) are recorded on a two-dimensional detector. The intensity of the GTRs is modulated by the three-dimensional shape and arrangement of the lines. Previous studies aimed to extract an average cross-sectional profile of the gratings, attributing intensity loss at GTRs to sample imperfections. Such imperfections are just as important as the average shape when employing soft polymer gratings which display significant line-edge roughness. Herein are reported a series of GISAXS measurements of polymer line gratings over a range of incident angles. Both an average shape and fluctuations contributing to the intensity in between the GTRs are extracted. The results are critically compared with atomic force microscopy (AFM) measurements, and it is found that the two methods are in good agreement if appropriate corrections for scattering from the substrate (GISAXS) and contributions from the probe shape (AFM) are accounted for.

Nanometer surface gratings on Si(100) characterized by x-ray scattering under grazing incidence and atomic force microscopy

1997 ◽  
Vol 81 (3) ◽  
pp. 1212-1216 ◽  
Author(s):  
T. H. Metzger ◽  
K. Haj-Yahya ◽  
J. Peisl ◽  
M. Wendel ◽  
H. Lorenz ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Grazing Incidence ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

scholarly journals Bicontinuous Gyroid Phase of a Water-Swollen Wedge-Shaped Amphiphile: Studies with In-Situ Grazing-Incidence X-ray Scattering and Atomic Force Microscopy

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 2892
Author(s):  
Kseniia N. Grafskaia ◽  
Azaliia F. Akhkiamova ◽  
Dmitry V. Vashurkin ◽  
Denis S. Kotlyarskiy ◽  
Diego Pontoni ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Environmental Conditions ◽  
Grazing Incidence ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Double Gyroid ◽  
Ray Scattering

We report on formation of a bicontinuous double gyroid phase by a wedge-shaped amphiphilic mesogen, pyridinium 4′-[3″,4″,5″-tris-(octyloxy)benzoyloxy]azobenzene-4-sulfonate. It is found that this compound can self-organize in zeolite-like structures adaptive to environmental conditions (e.g., temperature, humidity, solvent vapors). Depending on the type of the phase, the structure contains 1D, 2D, or 3D networks of nanometer-sized ion channels. Of particular interest are bicontinuous phases, such as the double gyroid phase, as they hold promise for applications in separation and energy. Specially designed environmental cells compatible with grazing-incidence X-ray scattering and atomic force microscopy enable simultaneous measurements of structural parameters/morphology during vapor-annealing treatment at different temperatures. Such in-situ approach allows finding the environmental conditions at which the double gyroid phase can be formed and provide insights on the supramolecular structure of thin films at different spatial levels.

Ordering of self-assembledSi1−xGexislands studied by grazing incidence small-angle x-ray scattering and atomic force microscopy

1998 ◽  
Vol 58 (16) ◽  
pp. 10523-10531 ◽  
Author(s):  
M. Schmidbauer ◽  
Th. Wiebach ◽  
H. Raidt ◽  
M. Hanke ◽  
R. Köhler ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
Force Microscopy ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering

Intrinsic roughness and interfaces of Cr/Be multilayers

2021 ◽  
Vol 54 (6) ◽  
Author(s):  
Roman Pleshkov ◽  
Nikolay Chkhalo ◽  
Vladimir Polkovnikov ◽  
Mikhail Svechnikov ◽  
Maria Zorina
Keyword(s):  
Atomic Force Microscopy ◽  
Optical Contrast ◽  
Multilayer Mirrors ◽  
X Ray ◽  
Force Microscopy ◽  
Layer Material ◽  
Multilayer Mirror ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Sharp Structure

The structures of Cr/Be multilayer mirror interfaces are investigated using X-ray reflectometry, diffuse X-ray scattering and atomic force microscopy. The combination of these methods makes it possible to separate the contributions of roughness and interlayer diffusion/intermixing for each sample. In the range of period thicknesses of 2.26–0.8 nm, it is found that the growth roughness of the Cr/Be multilayer mirrors does not depend on the period thickness and is ∼0.2 nm. The separation of roughness and diffuseness allows estimation of layer material intermixing and the resulting drop in the optical contrast, which is from 0.85 to 0.17 in comparison with an ideally sharp structure.

Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy

1999 ◽  
Vol 38 (4) ◽  
pp. 684 ◽  
Author(s):  
Victor E. Asadchikov ◽  
Angela Duparré ◽  
Stefan Jakobs ◽  
Albert Yu. Karabekov ◽  
Igor V. Kozhevnikov ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Force Microscopy ◽  
Comparative Study ◽  
X Ray ◽  
Force Microscopy ◽  
Optical Surfaces ◽  
X Ray Scattering ◽  
Atomic Force ◽  
Ray Scattering
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