Epi-film thickness measurements using emission Fourier transform infrared spectroscopy. II. Real-time in situ process monitoring and control

1995 ◽  
Vol 8 (3) ◽  
pp. 340-345 ◽  
Author(s):  
Zhen-Hong Zhou ◽  
R. Reif
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Film Thickness ◽  
Fourier Transform Infrared Spectroscopy ◽  
Process Monitoring ◽  
Monitoring And Control ◽  
Process Monitoring And Control ◽  
And Control ◽  
Thickness Measurements

Fourier transform infrared spectroscopy for process monitoring and control

1992 ◽  
Author(s):  
Peter R. Solomon ◽  
Philip W. Morrison, Jr. ◽  
Michael A. Serio ◽  
Robert M. Carangelo ◽  
James R. Markham ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Fourier Transform Infrared Spectroscopy ◽  
Process Monitoring ◽  
Fourier Transform Infrared ◽  
Monitoring And Control ◽  
Process Monitoring And Control ◽  
And Control

Fourier transform infrared spectroscopy for process monitoring and control

1993 ◽  
Author(s):  
Peter R. Solomon ◽  
Philip W. Morrison, Jr. ◽  
Michael A. Serio ◽  
Robert M. Carangelo ◽  
James R. Markham ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Fourier Transform Infrared Spectroscopy ◽  
Process Monitoring ◽  
Fourier Transform Infrared ◽  
Monitoring And Control ◽  
Process Monitoring And Control ◽  
And Control
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