Full 300 mm electrical characterization of 3D integration using High Aspect Ratio (10:1) mid-process through silicon vias

2015 ◽  
Author(s):  
F. Gaillard ◽  
T. Mourier ◽  
L. Religieux ◽  
D. Bouchu ◽  
C. Ribiere ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrical Characterization ◽  
3D Integration ◽  
Through Silicon Vias ◽  
Silicon Vias

Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias

2012 ◽  
Vol 22 (5) ◽  
pp. 055021 ◽  
Author(s):  
Pradeep Dixit ◽  
Tapani Vehmas ◽  
Sami Vähänen ◽  
Philippe Monnoyer ◽  
Kimmo Henttinen
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrical Characterization ◽  
Through Silicon Vias ◽  
Poly Silicon ◽  
Silicon Vias

High aspect ratio copper through-silicon-vias for 3D integration

2008 ◽  
Vol 85 (10) ◽  
pp. 1952-1956 ◽  
Author(s):  
Chongshen Song ◽  
Zheyao Wang ◽  
Qianwen Chen ◽  
Jian Cai ◽  
Litian Liu
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
3D Integration ◽  
Through Silicon Vias ◽  
Silicon Vias

scholarly journals Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration

2020 ◽  
pp. 1-1 ◽  
Author(s):  
J. A. Alfaro-Barrantes ◽  
M. Mastrangeli ◽  
D. J. Thoen ◽  
S. Visser ◽  
J. Bueno ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
3D Integration ◽  
Through Silicon Vias ◽  
Silicon Vias

Measurement-based electrical characterization of through silicon vias and transmission lines for 3D integration

2016 ◽  
Vol 149 ◽  
pp. 145-152 ◽  
Author(s):  
Xin Sun ◽  
Runiu Fang ◽  
Yunhui Zhu ◽  
Xiao Zhong ◽  
Yuan Bian ◽  
...  
Keyword(s):  
Transmission Lines ◽  
Electrical Characterization ◽  
3D Integration ◽  
Through Silicon Vias ◽  
Silicon Vias

scholarly journals Tailoring femtosecond 1.5-μm Bessel beams for manufacturing high-aspect-ratio through-silicon vias

2017 ◽  
Vol 7 (1) ◽  
Author(s):  
Fei He ◽  
Junjie Yu ◽  
Yuanxin Tan ◽  
Wei Chu ◽  
Changhe Zhou ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Bessel Beams ◽  
Through Silicon Vias ◽  
Silicon Vias
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