Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration
J. A. Alfaro-Barrantes
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M. Mastrangeli
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D. J. Thoen
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S. Visser
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J. Bueno
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...
F. Gaillard
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T. Mourier
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L. Religieux
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D. Bouchu
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C. Ribiere
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...
2008 ◽
Vol 85
(10)
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pp. 1952-1956
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Chongshen Song
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Zheyao Wang
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Qianwen Chen
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Jian Cai
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Litian Liu
Dean Malta
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Christopher Gregory
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Dorota Temple
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Chen Wang
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Thomas Richardson
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...
2012 ◽
Vol 22
(5)
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pp. 055021
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Pradeep Dixit
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Tapani Vehmas
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Sami Vähänen
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Philippe Monnoyer
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Kimmo Henttinen
Ziyue Zhang
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Yingtao Ding
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Lei Xiao
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Ziru Cai
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Baoyan Yang
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...
2015 ◽
Vol 5
(1)
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pp. 21-27
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Simon J. Bleiker
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Andreas C. Fischer
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Umer Shah
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Nutapong Somjit
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Tommy Haraldsson
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...
Fei He
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Junjie Yu
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Yuanxin Tan
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Wei Chu
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Changhe Zhou
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...
Liyi Li
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Jiali Wu
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C. P. Wong
2016 ◽
Vol 75
(2)
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pp. 19-24
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