[110] silicon etching for high aspect ratio comb structures

2002 ◽  
Author(s):  
Seong-Hyok Kim ◽  
Sang-Hun Lee ◽  
Hyung-Taek Lim ◽  
Yong-Kweon Kim ◽  
Seung-Ki Lee
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching

Study of high aspect ratio silicon etching based on ICP

2015 ◽  
Author(s):  
Jiang Hu ◽  
Shun Zhou ◽  
Shuai Hu ◽  
Yufeng Zhu ◽  
Weiguo Liu
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Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching

scholarly journals The Study of Latex Sphere Lithography for High Aspect Ratio Dry Silicon Etching

2020 ◽  
Vol 217 (4) ◽  
pp. 2070017
Author(s):  
Ivan Morozov ◽  
Alexander Gudovskikh ◽  
Alexander Uvarov ◽  
Artem Baranov ◽  
Vladimir Sivakov ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching ◽  
Latex Sphere

scholarly journals Crystallographic Silicon-Etching for Ultra-High Aspect-Ratio FinFET

2019 ◽  
Vol 13 (1) ◽  
pp. 313-320 ◽  
Author(s):  
Vladimir Jovanovic ◽  
Tomislav Suligoj ◽  
Lis Nanver
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching

The Study of Latex Sphere Lithography for High Aspect Ratio Dry Silicon Etching

2019 ◽  
Vol 217 (4) ◽  
pp. 1900535 ◽  
Author(s):  
Ivan Morozov ◽  
Alexander Gudovskikh ◽  
Alexander Uvarov ◽  
Artem Baranov ◽  
Vladimir Sivakov ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Silicon Etching ◽  
Latex Sphere
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