System identification, modeling and precision motion control of a linear motor drive stage
Keyword(s):
2005 ◽
Vol 52
(5)
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pp. 1357-1363
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Keyword(s):
2007 ◽
Vol 12
(2)
◽
pp. 198-207
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2014 ◽
Vol 10
(1)
◽
pp. 99-108
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Keyword(s):
Keyword(s):
2012 ◽
Vol 8
(2)
◽
pp. 351-365
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Keyword(s):
2004 ◽
2021 ◽