Sliding mode control of a piezo-driven micropositioning system using extended Kalman filter
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2017 ◽
Vol 27
(2)
◽
pp. 84
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Keyword(s):
2012 ◽
Vol 433-440
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pp. 2092-2098
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Keyword(s):
Keyword(s):
2017 ◽
Vol 27
(2)
◽
pp. 84
Keyword(s):