Sapphire-based capacitive pressure sensor for high temperature and harsh environment application

In the paper, a touch mode capacitive pressure sensor with double-notches structure is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in hash environment such as high-temperature. The analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has high sensitivity and long linear range simultaneously. In addition, the technical process of the sensor has been designed in detail in the paper. The research shows that the sensor packaged in a high-temperature ceramic AlN can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.

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A Silicon Carbide Capacitive Pressure Sensor for High Temperature and Harsh Environment Applications

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300703 ◽

2007 ◽

Cited By ~ 9

Author(s):

Li Chen ◽

Mehran Mehregany

Keyword(s):

Silicon Carbide ◽

High Temperature ◽

Pressure Sensor ◽

Harsh Environment ◽

Capacitive Pressure Sensor

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High-Temperature Capacitive Mode Pressure Sensor Based on SiC

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.605-607.1440 ◽

2012 ◽

Vol 605-607 ◽

pp. 1440-1443

Author(s):

Hui Yong Yu ◽

Hao Jie Lv ◽

Wei Zhong Song ◽

Zhi Bang Yang ◽

Ming Hua Pang

Keyword(s):

Finite Element Method ◽

High Temperature ◽

Pressure Sensor ◽

Material Properties ◽

High Accuracy ◽

Harsh Environment ◽

Capacitive Pressure Sensor ◽

Temperature Environment ◽

Single Cavity ◽

High Temperature Environment

In order to realize high-accuracy pressure measurement in harsh environment, a new kind of Double-notches Touch Mode Capacitive Pressure Sensor (DTMCPS) based on SiC material is presented. Through research to material properties of the sensor, the sensor can be applied in high-temperature field. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that DTMCPS can immensely improve the sensitivity and the linear range of traditional single cavity sensor because of its double notches structure. Consequently, the sensor has outstanding measurement performance in high-temperature environment.

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A study of a Silicon Carbide Capacitive Pressure Sensor Applied in Harsh Environment

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.241-244.984 ◽

2012 ◽

Vol 241-244 ◽

pp. 984-987

Author(s):

Hao Jie Lv ◽

Hui Yong Yu ◽

Jiang Hua Hou ◽

Tao Geng

Keyword(s):

High Temperature ◽

Pressure Sensor ◽

Simulation Analysis ◽

External Pressure ◽

Harsh Environment ◽

Capacitive Pressure Sensor ◽

Technical Process ◽

Temperature Environment ◽

Higher Temperature ◽

Higher Sensitivity

In the paper, a Double-notches Touch Mode Capacitive Pressure Sensor (DTMCPS) is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in high-temperature environment. The simulation analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has higher sensitivity and longer linear range than traditional one. At the same time, the technical process of the sensor has been designed in the paper. The research shows that DTMCPS packaged in a high-temperature ceramic package can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.

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