High-Temperature Capacitive Mode Pressure Sensor Based on SiC

2012 ◽  
Vol 605-607 ◽  
pp. 1440-1443
Author(s):  
Hui Yong Yu ◽  
Hao Jie Lv ◽  
Wei Zhong Song ◽  
Zhi Bang Yang ◽  
Ming Hua Pang
Keyword(s):  
Finite Element Method ◽  
High Temperature ◽  
Pressure Sensor ◽  
Material Properties ◽  
High Accuracy ◽  
Harsh Environment ◽  
Capacitive Pressure Sensor ◽  
Temperature Environment ◽  
Single Cavity ◽  
High Temperature Environment

In order to realize high-accuracy pressure measurement in harsh environment, a new kind of Double-notches Touch Mode Capacitive Pressure Sensor (DTMCPS) based on SiC material is presented. Through research to material properties of the sensor, the sensor can be applied in high-temperature field. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that DTMCPS can immensely improve the sensitivity and the linear range of traditional single cavity sensor because of its double notches structure. Consequently, the sensor has outstanding measurement performance in high-temperature environment.

Study of High-Temperature MEMS Pressure Sensor Based on SiC-AlN Structure

2013 ◽  
Vol 562-565 ◽  
pp. 471-476 ◽  
Author(s):  
Hao Jie Lv ◽  
Tao Geng ◽  
Guo Qing Hu
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Sandwich Structure ◽  
High Sensitivity ◽  
High Accuracy ◽  
External Pressure ◽  
Harsh Environment ◽  
Capacitive Pressure Sensor ◽  
Technical Process ◽  
Higher Temperature

In the paper, a touch mode capacitive pressure sensor with double-notches structure is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in hash environment such as high-temperature. The analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has high sensitivity and long linear range simultaneously. In addition, the technical process of the sensor has been designed in detail in the paper. The research shows that the sensor packaged in a high-temperature ceramic AlN can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.

A study of a Silicon Carbide Capacitive Pressure Sensor Applied in Harsh Environment

2012 ◽  
Vol 241-244 ◽  
pp. 984-987
Author(s):  
Hao Jie Lv ◽  
Hui Yong Yu ◽  
Jiang Hua Hou ◽  
Tao Geng
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Simulation Analysis ◽  
External Pressure ◽  
Harsh Environment ◽  
Capacitive Pressure Sensor ◽  
Technical Process ◽  
Temperature Environment ◽  
Higher Temperature ◽  
Higher Sensitivity

In the paper, a Double-notches Touch Mode Capacitive Pressure Sensor (DTMCPS) is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in high-temperature environment. The simulation analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has higher sensitivity and longer linear range than traditional one. At the same time, the technical process of the sensor has been designed in the paper. The research shows that DTMCPS packaged in a high-temperature ceramic package can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.

scholarly journals Phase Interrogation Used for a Wireless Passive Pressure Sensor in an 800 °C High-Temperature Environment

Sensors ◽  
2015 ◽  
Vol 15 (2) ◽  
pp. 2548-2564 ◽  
Author(s):  
Huixin Zhang ◽  
Yingping Hong ◽  
Ting Liang ◽  
Hairui Zhang ◽  
Qiulin Tan ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Passive Pressure ◽  
Temperature Environment ◽  
Phase Interrogation ◽  
High Temperature Environment

A Study of Temperature Dependence for Capacitive Pressure Sensor

2011 ◽  
Vol 105-107 ◽  
pp. 2024-2027
Author(s):  
Hao Jie Lv ◽  
Guo Qing Hu ◽  
Xing Ye Wang
Keyword(s):  
Finite Element Method ◽  
Finite Element ◽  
High Temperature ◽  
Temperature Dependence ◽  
Pressure Sensor ◽  
Capacitive Pressure Sensor ◽  
Material Parameters ◽  
Temperature Performance ◽  
Sensor Temperature ◽  
Element Method

In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding.

Modification on Hydrophilic property for Harsh Environment

2005 ◽  
Vol 890 ◽  
Author(s):  
Hsin-Chang Tsai ◽  
Yu-Ru Chang ◽  
Tai-Kang Shing
Keyword(s):  
High Temperature ◽  
Thermal Load ◽  
Temperature Stability ◽  
Harsh Environment ◽  
High Temperature Stability ◽  
Hydrophilic Property ◽  
Temperature Environment ◽  
Temperature Controlled ◽  
Pure Cu ◽  
High Temperature Environment

ABSTRACTIn this research, a 1∼2 um NiCo film coated by electroplating technique as protection film in high temperature environment was studied. The improvements of hydrophilic property and high temperature stability by coating NiCo film upon pure Cu plate have been characterized through experiments. In thermal stability characterization, the specimens were put into a temperature-controlled oven and applied a thermal load at 100°C, 200°C and 300°C for annealing. After thermal annealing, the hydrophilic property was characterized to confirm that NiCo film was stable in high temperature environment. The hydrophilic property was represented by the contact angle between the DI water and the surface of NiCo film. The outgasing effect of contaminated polymer was also study. The electroplated NiCo film has advantages of good hydrophilic property, high temperature stability and easy fabrication. Therefore, the NiCo film could help the development of thermal related products.

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